Controllable mix abrasive jet polishing equipment for large-scale ultra-precision optical glass

An optical glass and abrasive jet technology, which is applied in grinding/polishing equipment, grinding machines, metal processing equipment, etc., can solve problems such as low cost requirements, inability to meet large glass processing, etc., and achieve the effect of improving polishing efficiency

Inactive Publication Date: 2012-09-26
DONGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a device for ultra-precision processing of large glass through high-speed rotating polishing tool and mixed abrasive high-pressure jet elastic injection, so as to solve the problem that the existing micron-scale polishing equipment for fluid particles cannot meet the high processing requirements of large glass. Accuracy, high efficiency, and low cost requirements

Method used

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  • Controllable mix abrasive jet polishing equipment for large-scale ultra-precision optical glass
  • Controllable mix abrasive jet polishing equipment for large-scale ultra-precision optical glass
  • Controllable mix abrasive jet polishing equipment for large-scale ultra-precision optical glass

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] Such as figure 2 As shown, it is a schematic diagram of a large-scale ultra-precision optical glass controllable mixed abrasive jet polishing equipment. The large-scale ultra-precision optical glass controllable mixed abrasive jet polishing equipment includes a jet generation and transmission system and a robot controllable abrasive fluid polishing system.

[0017] The jet generation and transmission system includes a hydraulic oil tank 1 fixed on a flat ground, the hydraulic oil tank 1 is connected to the suction port of the first diaphragm pump 2, and the outlet of the first diaphragm pump 2 is connected to the three-position four-way solenoid valve 4 The P end, the A end and the B end of the three-position four-way solenoid valve 4 are respectively connected to the second high-pressure container 6 and the first high-pressure container 5, and the second high-pressure container 6 is provided with a first flexible sealing bladder 7, and the first high-pressure containe...

Embodiment 2

[0026] Such as figure 2 As shown, it is a schematic diagram of a large-scale ultra-precision optical glass controllable mixed abrasive jet polishing equipment, and the large-scale ultra-precision optical glass controllable mixed abrasive jet polishing equipment is the same as that in Example 1.

[0027] When using the above-mentioned equipment to perform inching polishing on the separation high point of the large glass surface, open the first two-position two-way reversing valve 9, close the second two-position two-way reversing valve 10, and the third two-position two-way reversing valve Valve 11 and the fourth two-position two-way reversing valve 12 start the second diaphragm pump 14, and deliver the mixed abrasive polishing liquid to the second flexible sealing bladder 8 in the first high-pressure container 5, and the mixed abrasive polishing liquid is filled with the second When the flexible sealing bladder 8 is used, the first two-position two-way reversing valve 9 is cl...

Embodiment 3

[0029] Such as figure 2 As shown, it is a schematic diagram of a large-scale ultra-precision optical glass controllable mixed abrasive jet polishing equipment, and the large-scale ultra-precision optical glass controllable mixed abrasive jet polishing equipment is the same as that in Example 1.

[0030] When the above-mentioned equipment is used to polish the large glass surface as a whole, it is similar to the continuous polishing of the large glass surface according to the set path. The difference is that the first axial guide rail 22 and the second axial guide rail 21 are fixed, and the turntable 18 keeps rotating. The six-degree-of-freedom robot 16 drives the electric spindle 19 and the polyurethane control wheel 24 to move back and forth at a constant speed along the radial direction of the large glass surface.

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Abstract

The invention provides controllable mix abrasive jet polishing equipment for large-scale ultra-precision optical glass. The controllable mix abrasive jet polishing equipment is characterized by comprising a jet generating and transmission system and a robot controllable abrasive fluid polishing system. The equipment provided by the invention increases the machining precision and the machining efficiency, remarkably improves the shape precision and the roughness of large glass, eliminates subsurface damage and realizes machining of free surfaces.

Description

technical field [0001] The invention provides a large-scale ultra-precision optical glass controllable mixed abrasive jet polishing equipment. Background technique [0002] With the development of science and technology, large-scale ultra-precision optical glass components with a diameter or diagonal diameter of more than 1m and within the range of 1m, whose surface shape accuracy reaches 0.8μm, and whose surface roughness reaches Ra 10nm (hereinafter referred to as "large glass") ”) are more widely used in industries such as aerospace, astronomy and nuclear energy. In order to achieve the above precision, the current international mainstream processing technology flow is: ultra-precision grinding, which can achieve a flatness of 1-2 μm and a surface roughness of Ra 50-150nm; fluid particle micron-level polishing, which can achieve a flatness of 0.5-1 μm and a rough surface Ra 20-50nm; nano-scale polishing, can reach flatness 10-15nm, surface roughness Ra 0.5-1nm. Among th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B7/24B24B57/02
Inventor 闫如忠周勤之柳源邹鲲戴惠良杨延竹甘敏华胡紹波
Owner DONGHUA UNIV
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