Thermal diffusivity sensor chip with silicon cup structure and preparation method of thermal diffusivity sensor chip
A sensor chip and thermal diffusivity technology, which is applied in the field of thermal diffusivity sensor chips, can solve the problem of not considering the influence of heat capacity and diameter of thermal probes, and achieve more authentic and reliable measurement results, fast response, and good thermal insulation effect Effect
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[0033] The thermal diffusivity sensor chip of the silicon cup structure of the present invention and the preparation method thereof will be described in detail below in conjunction with the accompanying drawings:
[0034] Reference figure 1 , Is the plane structure diagram of the sensor chip of the present invention. The temperature sensor 2 of the thermal diffusivity sensor chip of the silicon cup structure of the present invention is located in the center, and the four heaters 1 and the four temperature sensors 3 are surrounded by the temperature sensor 2 In two squares, metal leads lead the two ends of the heater and the temperature sensor to the pads respectively. By heating the heater 1, the temperature sensors distributed in the periphery and the center produce accurate and rapid temperature response. The heater and temperature sensor are made of chromium-nickel-platinum multilayer metal film.
[0035] Reference figure 2 , The lower surface of the SOI wafer is etched upwar...
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