High-capacity deposition device for forming a thin film

Abstract

The invention discloses a high-capacity deposition device for forming a thin film, comprising multiple source container, an evaporation room, a jet hole, a first heater, a sensor and a controller, wherein the source material to be deposited on a substrate is contained in multiple source containers in as a thin film solid state or liquid state; the evaporation room is arranged above the source containers and are coupled and connected with the source container; the evaporated source material of the source containers passes through the evaporation room; the jet hole is formed on the top of the evaporation room and jets upward and penetrates through the evaporated source material of the evaporation room; the first heater is arranged in the evaporation room and above the source containers for supplying heat to the source containers to evaporate the source material in the source containers; the sensor is arranged in the evaporation room and senses the quantity of the evaporated source material of the evaporation room; and the controller obtains the feedback about the quantity of the evaporated material in the evaporation room, and controls the quantity of the source material evaporated from the evaporation room.

Description

[0001] Cross References to Related Applications [0002] This application claims priority and rights to Korean Patent Application No. 10-2011-0034340 filed with the Korean Intellectual Property Office on April 13, 2011, the entire contents of which are incorporated by reference. technical field [0003] The present invention relates to a large-capacity deposition apparatus for forming a thin film, and more particularly, to a large-capacity deposition apparatus for forming a thin film in which organic matter can be evaporated and deposited on a substrate in the form of a thin film. Background technique [0004] An organic light-emitting device is a next-generation display device capable of emitting light by itself, and has superior viewing angle, contrast ratio, response speed, power consumption, etc., compared with performance of a liquid crystal display (LCD) device. [0005] The organic light emitting device includes organic light emitting diodes connected in a matrix bet...

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Problems solved by technology

[0007] However, the amount of organic matter that can be stored in the source container is limited, and thus there arises the problem that the organic matter must be refilled frequently during the deposition process, and in all these cases, large-capacity deposition equipment for forming thin films should be refilled during the refill process. Medium shutdown

[0008] Although a method has recently been proposed to increase the loading of organics by providing a large-capacity source container, the problem of organic denaturation still occurs because more heat is supplied to the source container to heat the enlarged source container and evaporate the organics

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