Migration tube filter of asymmetric high field strength ion mobility spectrometry analyzer and machining method of migration tube filter

Abstract

The invention discloses a migration tube filter of an asymmetric high field strength ion mobility spectrometry analyzer and a realizing method of the migration tube filter. The method adopts the technologies of wet etching and silicon bonding. The FAIMS migration tube filter comprises a first silicon chip and a second silicon chip which are identical in structures and are mutually bonded; the first silicon chip comprises a silicon chip body as well as a first oxidizing layer, a first metal pattern layer, a second oxidizing layer, a second metal pattern layer, a third oxidizing layer and at least one group of cavities which are machined on the silicon chip body in sequence, wherein the first metal pattern layer comprises at least three groups of metal patterns which are insulated from one another; the second metal pattern layer comprises at least three groups of metal patterns which are insulated from one another; and the thicknesses of the first silicon chip and the second silicon chip are 30 to 100 micrometers. The method can adopt the wet etching technology on the basis of common high-voltage integrated circuit technology, and obtains acceptable FAIMS filtering area electric field under the effect of standard electric field electrodes. The method not only obviously reduces the machining cost of the FAIMS filter, but also obtains higher iron detection accuracy.

Description

technical field [0001] The invention relates to an asymmetric high-field-strength ion mobility spectrometer, in particular to an asymmetric high-field-strength ion mobility spectrometer FAIMS migration tube filter and a processing method thereof. Background technique [0002] Ion Mobility Spectrometer IMS is an efficient method for detecting specific molecules from gas samples. figure 1 shows a typical ion mobility spectrometer transfer tube filter configuration, according to figure 1 , the carrier gas and sample gas enter the ionization region through the direction indicated by the arrow on the left, and are ionized in the ionization region; the ionized sample gas enters the migration region, and migrates under the action of the internal electric field of the migration region; In the electric field, different ions have different mobilities, so the time it takes to pass through the entire migration region is also different. By measuring the length of the migration region a...

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Problems solved by technology

Although the above-mentioned dry etching can form a processed surface with high perpendicularity to the end face, along the etching direction, due to the characteristics of the processing process, it is still difficult to control the uniformity of the electrode surface of the transfer tube filter electric field, so the manufactured FAIMS transfer tube cost too high

[0010] In addition, in the FAIMS transfer tube design of interdigitated structure, in the top corner area of ​​the interdigitated, the spacing of the electric field electrodes is theoretically the designed spacing times, there is a singular electric field, which reduces the resolution of the detection

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