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Method and device for measuring novel laser heterodyne interference based on small frequency difference and beam splitting

A technology of laser heterodyne interference and beam separation, applied in the field of laser applications, can solve problems such as measurement speed limitation, and achieve the effect of simplifying design, high resolution, and reducing adjustment difficulty

Active Publication Date: 2013-01-02
HARBIN INST OF TECH
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Problems solved by technology

[0008] Aiming at the shortcomings of the above-mentioned existing laser heterodyne interferometer, the present invention proposes a laser heterodyne interferometry method and device based on small frequency difference and beam separation, which improves the measurement accuracy of laser heterodyne interference and solves the problem of laser light source frequency difference Problem with measuring speed limit

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  • Method and device for measuring novel laser heterodyne interference based on small frequency difference and beam splitting
  • Method and device for measuring novel laser heterodyne interference based on small frequency difference and beam splitting

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Embodiment Construction

[0031] The examples of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0032]A high-speed ultra-precision laser heterodyne interferometry device based on small frequency difference and beam separation, the device includes a frequency-stabilized laser 1, a non-polarizing beamsplitter prism 2, a corner mirror 3, a reference prism 4, a photodetector A 5, Photodetector B6, this device also includes phase meter A7, phase meter B8, switch circuit 9, measuring circuit 10, wherein, non-polarization beam splitter prism 2 is positioned at output end of frequency-stabilized laser 1; Corner mirror 3 is positioned at non-polarization beam splitter prism The transmitted light output end of 2, the reference prism 4 is located at the reflected light output end of the non-polarizing beam splitting prism 2; the non-polarizing beam splitting prism 2 outputs two interferometric beams, one of which is connected to the photodetector A5, and th...

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Abstract

The invention discloses a method and a device for measuring novel laser heterodyne interference based on small frequency difference and beam splitting, and belongs to the technical field of laser application. The method comprises the following steps of: using reference light and measuring light subjected to spatial isolation; and generating two interferometry signals having opposite doppler frequency shift and selectively using two measuring signals to perform interferometry according to motion direction and speed of a measured target. By utilizing the device, a traditional polarization splitting prism is replaced by a non-polarization splitting prism, and two photoelectric detectors, two phase meters and a switch circuit are additionally arranged into the device. By utilizing the method and the device, the phenomenon of mixed overlapping of the frequency in an interferometer is avoided; the measurement accuracy of the heterodyne interferometry is improved; and the problem that the measuring speed is limited by the laser light source frequency difference is solved.

Description

technical field [0001] The invention belongs to the technical field of laser applications, and mainly relates to a laser heterodyne interferometry method and device based on small frequency difference and beam separation. Background technique [0002] Laser heterodyne interferometry is widely used in ultra-precision machining, lithography machines, and three-coordinate measuring machines because of its strong anti-interference ability, large measurement range, high signal-to-noise ratio, and easy realization of high precision. With the continuous development of ultra-precision engineering, higher and higher requirements are put forward for machining accuracy and production efficiency; at the same time, new challenges are raised for the measurement accuracy, resolution and speed of heterodyne interferometry. [0003] In laser heterodyne interferometry, the nonlinear error severely limits the further improvement of measurement accuracy and resolution. Scholars at home and abro...

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Application Information

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IPC IPC(8): G01B11/02G01B11/04
Inventor 谭久彬刁晓飞胡鹏程杨千惠白洋
Owner HARBIN INST OF TECH
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