Method for manufacturing an aluminosilicate glass substrate for hard disks

A technology of aluminosilicate glass and a manufacturing method, which is applied in the directions of manufacturing tools, manufacturing base layers, and record carrier manufacturing, etc., can solve the problems of collision between magnetic heads and disk surfaces, and achieve the effect of reducing surface undulations

Active Publication Date: 2013-01-02
KAO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At this time, if the roughness of the substrate surface is large, there will be a problem of collision between the magnetic head and the disk surface when reading and writing.

Method used

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  • Method for manufacturing an aluminosilicate glass substrate for hard disks
  • Method for manufacturing an aluminosilicate glass substrate for hard disks
  • Method for manufacturing an aluminosilicate glass substrate for hard disks

Examples

Experimental program
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preparation example Construction

[0065] [Preparation Method of Polishing Liquid Composition]

[0066] The polishing composition can be prepared by mixing components by a known method. From an economical point of view, polishing liquid compositions are usually produced as concentrates, which are often diluted at the point of use. The polishing liquid composition can also be used as it is, and if it is a concentrated liquid, it can be used after being diluted. In the case of diluting the concentrate, the dilution ratio is not particularly limited, and can be appropriately determined according to the concentration of each component in the concentrate (content of grinding material, etc.), grinding conditions, and the like.

[0067] The pH of the polishing liquid composition can be adjusted to a predetermined pH after the mixing of the ingredients, or the pH of the polishing liquid composition can be adjusted to a desired value by mixing the ingredients. The pH of the ingredients were adjusted individually befor...

Embodiment 1～4 and comparative example 1～12

[0089] 1. Preparation of ground substrate

[0090] Table 2 shows details of the substrates to be polished. Wa (arithmetic mean fluctuation) of a medium wavelength (160-500 micrometers) is the value measured with New View 5032 (made by Zygo Corporation).

[0091] (1) Aluminosilicate glass substrate

[0092] As a substrate to be polished, an aluminosilicate glass substrate previously roughly polished with a polishing liquid composition containing cerium oxide abrasive grains was prepared. The content of Al contained in the substrate was 8.6% by weight, the content of Si was 27.1% by weight, and the content of Na was 6.0% by weight. These values ​​were measured using the ESCA method under the following measurement conditions.

[0093] 〔ESCA measurement conditions〕

[0094] ·Sample making

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Abstract

The disclosed method for manufacturing an aluminosilicate glass substrate for hard disks includes a step in which an aluminosilicate glass substrate is polished using a liquid polishing composition that contains silica particles, a polymer containing sulfonic acid groups, and water, with the adsorption constant of said polymer with respect to aluminosilicate glass being between 1.5 and 5.0 L / g. Said polymer preferably contains an aromatic ring and has a weight-average molecular weight preferably between 3,000 and 100,000.

Description

technical field [0001] The present invention relates to a method for manufacturing an aluminosilicate glass substrate for a hard disk, and a method for reducing surface waviness of the aluminosilicate glass substrate for a hard disk. Background technique [0002] In recent years, miniaturization and increase in capacity of magnetic disk drives have progressed, and thus higher recording density has been demanded. In order to increase the recording density, it is necessary to reduce the unit recording area and improve the detection sensitivity of the weakened magnetic signal, so the development of technology for further reducing the flying height of the magnetic head is being promoted. At this time, if the roughness of the surface of the substrate is large, a collision between the magnetic head and the surface of the disk may occur during reading and writing. Therefore, in order to achieve further high recording density, more excellent surface quality is required for glass su...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/00C09K3/14G11B5/84G11B5/73
CPCG11B5/8404C09K3/1463
Inventor 土居阳彦内野阳介西本和彦
Owner KAO CORP
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