Light path compensation based laser heterodyne interference measurement method and light path compensation based laser heterodyne interference measurement device
A laser heterodyne interferometry and measurement device technology, which is applied in the field of laser applications, can solve problems such as measurement speed limitations, and achieve the effects of simplified design, reduced adjustment difficulty, and high resolution
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[0035]The examples of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0036] A high-speed ultra-precision laser heterodyne interferometry device based on optical path compensation, the device includes a frequency-stabilized laser 1, a beam splitter 2, a polarization beam splitter 5, a measuring prism 6, a quarter-wave plate 7, and a measuring plane mirror 8 , photodetector A9, photodetector B10, the device also includes reflective prism 3, reference prism 4, phase meter A11, phase meter B12, switch circuit 13, measurement circuit 14, wherein, beam splitter 2 is located at the output of frequency stabilized laser 1 end; reflective prism 3 is located in the reflection direction of beam splitter 2, reference prism 4 is located in the reflection direction of reflective prism 3; polarizing beam splitter 5 is located in the transmission direction of beam splitter 2; measuring prism 6 is located in the reflection direction of po...
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