Thermopile infrared detector, array and preparation method of thermopile infrared detector

Abstract

The invention provides a thermopile infrared detector and an array thereof. The thermopile infrared detector comprises a supporting part, a thermocouple part and an infrared absorption part. The supporting part comprises a supporting column and a cavity, the thermocouple part is suspended above the supporting part, a cold end of the thermocouple part is connected with the supporting column, and the infrared absorption part is positioned above the thermocouple part and connected with a hot end of the thermocouple part. Correspondingly, the invention further provides a preparation method of the thermopile infrared detector. The infrared absorption part and the thermocouple part of the thermopile infrared detector are not coplanar, the area of the infrared absorption part is unlimited by thermocouple number, and the infrared absorption part can maximally cover the whole thermocouple part, so that infrared absorption efficiency can be improved. An infrared absorption layer is made of black silicon materials, the preparation method is compatible to semiconductor IC (integrated circuit) process, and accordingly preparation cost of the detector can be lowered.

Description

technical field The invention relates to the field of infrared detectors, in particular to the field of thermopile infrared detectors. Background technique With the continuous development of infrared detection technology, infrared detectors have been used as core components in infrared temperature measurement, infrared detection, infrared alarm, infrared imaging, infrared guidance and other fields. The thermopile infrared detector is a kind of thermal detector, which mainly uses the thermoelectric effect to detect the change of the temperature of the object. A thermopile is composed of two or more thermocouples connected in series, and the thermoelectric potentials output by each thermocouple are superimposed on each other to form the thermoelectric potential of the thermopile. For common thermopile infrared detectors, an important parameter to characterize its characteristics is the responsivity, which is related to factors such as infrared absorption efficiency, detector ...

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Problems solved by technology

However, gold black coating and silver black coating are generally produced by resistance heating vacuum evaporation method, which is not compatible with IC (Integrated Circuit, integrated circuit) process

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