Silane tail gas purifying device
A tail gas purification device and silane technology, applied in the direction of incinerators, chemical instruments and methods, combustion methods, etc., can solve the problems of high risk and processing instability, and achieve simple structure, convenient operation and maintenance, and stable waste gas treatment Effect
Inactive Publication Date: 2013-03-06
苏州仕净科技股份有限公司
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Problems solved by technology
The traditional silane tail gas treatment method is the method of primary combustion + direct access to the pool, which has high risk and treatment instability
Method used
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Embodiment 1
[0015] The silane tail gas purification device in this embodiment consists of a combustion tower 1 and a waste gas treatment tower 2.
[0016] Such as figure 1 Shown, combustion tower 1 bottom is provided with air inlet 11, and top is provided with gas outlet 12, and ignition device is arranged in combustion tower, and the bottom of combustion tower 1 is funnel-shaped, and the bottom of combustion tower is provided with blowdown outlet 13.
[0017] Combustion tower 1 is provided with compressed air charging port 14 and nitrogen charging port 15, and compressed air charging port 14 and nitrogen charging port 15 are all provided with flow controller (flow controller and ignition device are not drawn among the figure).
[0018] Such as figure 2 As shown, the bottom of the waste gas treatment tower 2 is provided with an air inlet 21, and the top is provided with an air outlet 22, and the inside of the waste gas treatment tower is provided with packing layers 23 and 24 composed o...
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The invention provides a silane tail gas purifying device which is capable of treating silane tail gas effectively. The silane tail gas purifying device consists of a combustion tower and a waste gas treatment tower, and is characterized in that a gas inlet is reserved on the lower portion of the combustion tower, a gas outlet is reserved on the upper portion of the combustion tower, an ignition device is arranged in the combustion tower, an air inlet is arranged at the bottom of the waste gas treatment tower, an air outlet is arranged at the top of the waste gas treatment tower, two packing layers which are disposed from top to bottom are arranged inside the waste gas treatment tower, each packing layer consists of a packing support screen and packing thereon, nozzles are arranged between the two packing layers and are connected with a water supply tank through an acid and alkali resistant pipeline and a water pump, and the gas outlet of the combustion tower is communicated with the air inlet of the waste gas treatment tower. The silane tail gas purifying device is simple in structure, centralized in treatment, low-cost, convenient to operate and maintain, stable, efficient and through in waste gas treatment, and applicable to waste gas treatment for industries such as battery manufacturing.
Description
technical field [0001] The invention belongs to the field of waste gas treatment, in particular to a silane tail gas purification device. Background technique [0002] In the PECVD (Plasma Enhanced Chemical Vapor Deposition-----Plasma Enhanced Chemical Vapor Deposition) link of the cell production process, tail gas containing silane will be generated. Silane is a colorless, air-reactive, asphyxiating gas that usually ignites on contact with air and emits dense white fumes of amorphous silica and must therefore be treated before being released into the atmosphere. The traditional silane tail gas treatment method is the method of primary combustion + direct access to the pool, which has high risk and unstable treatment. Contents of the invention [0003] The purpose of the present invention is to propose a silane tail gas purification device to better handle the silane tail gas. [0004] The silane tail gas purification device of the present invention is composed of a comb...
Claims
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IPC IPC(8): F23G7/06F23J15/04B01D47/06
Inventor 赵晓武
Owner 苏州仕净科技股份有限公司