High-power heater capable of quickly warming and cooling

A heating and cooling, high-power technology, used in furnace heating elements and other directions, can solve the problems of high production cost, short service life, expensive materials, etc., and achieve the effect of increasing service life, reducing energy consumption, and improving uniformity

Inactive Publication Date: 2013-03-20
长沙市博垒德电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Existing high-power heaters for MOCVD include a furnace body, a PBN ceramic insulating plate located on the furnace body, and a heating wire positioned on the PBN ceramic insulating plate, which is sup

Method used

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  • High-power heater capable of quickly warming and cooling

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[0011] See the drawings, the present invention includes a furnace body, a metal reflector plate 10 arranged on the furnace body, and a heating wire 8 located on the metal reflector plate 10. The furnace body includes a negative electrode plate 13 and a positive electrode plate 15 arranged up and down. The positive electrode plate 15 and the negative electrode plate 13 are fixed and insulated from each other by the screw 6, the ceramic tube 17 and the ceramic tube 18 penetrating the phase sleeve. A fixing plate 14 is provided between the positive electrode plate 15 and the negative electrode plate 13, and the fixing plate 14 passes through the screw 2, The ceramic tube 19 is fixed under the negative electrode plate 13 and conducts electricity with the negative electrode plate 13. The metal reflector 10 adopts three layers (or one layer or two layers), and they are fixed by screw 1, screw 2, ceramic tube 3, and ceramic tube 4. Above the negative electrode plate 13, the positive el...

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Abstract

The invention discloses a high-power heater capable of quickly warming and cooling, which comprises a furnace body and is characterized by also comprising a layer of or a plurality of layers of metallic reflecting plates arranged on the furnace body and heating wires positioned on the metallic reflecting plates. In the high-power heater, the metallic reflecting plates are adopted to replace PBN (Pyrolytic Boron Nitride) ceramic insulation boards and ceramic parts as main heat insulation and insulating materials of the heater. The high-power heater has the following advantages that 1, the heater is made of tungsten, molybdenum and rhenium or other high-temperature alloys, and the insulation materials are made of 99 ceramic, so that the service life can be improved; 2, by applying the metallic reflecting plates, the downward heat of the heating wires can be reflected upwards, so that the temperature uniformity and the warming and cooling rate can be improved, and the energy consumption and the cost can be reduced; and 3, the heater is applicable to any environment protected by hydrogen or nitrogen.

Description

Technical field [0001] The invention belongs to a heater, and specifically relates to a high-power heater capable of quickly raising and lowering temperature. Background technique [0002] When metal organic chemical vapor deposition equipment (MOCVD) is used to prepare semiconductor film materials, the chemical reactions that occur are all under a specific temperature environment, and the temperature of each layer varies greatly. The temperature uniformity directly affects the quality of the film. Speed ​​affects the production cycle, and service life affects the cost of equipment. Therefore, the use of MOCVD to prepare semiconductor film materials in industrial production has high requirements on the temperature uniformity, temperature rise and fall rate and service life of the heater. Existing high-power heaters for MOCVD include a furnace body, a PBN ceramic insulating plate set on the furnace body, and a heating wire on the PBN ceramic insulating plate, which is supported o...

Claims

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Application Information

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IPC IPC(8): H05B3/64
Inventor 蒲勇
Owner 长沙市博垒德电子科技有限公司
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