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Discharge plasma electron density measuring device and method based on two-quadrant detector

A discharge plasma and two-quadrant detector technology, applied in the field of optical measurement, can solve the problems of high price, complex spectrometer device, complex operation and data processing, etc., and achieve the effect of improving measurement accuracy and overcoming complex structure

Inactive Publication Date: 2013-04-24
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

However, the spectrometer device is complicated, expensive, and the operation and data processing are relatively complicated

Method used

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  • Discharge plasma electron density measuring device and method based on two-quadrant detector
  • Discharge plasma electron density measuring device and method based on two-quadrant detector
  • Discharge plasma electron density measuring device and method based on two-quadrant detector

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Embodiment Construction

[0015] Since a large number of free electrons move much faster than the positive ions in the discharge plasma, the free electrons reciprocate around the positive ions in the microscopic view, and the oscillation of the entire discharge plasma appears in the macroscopic view. Discharge plasma oscillation frequency ω p for:

[0016] ω p = ( Ne 2 ϵ 0 m ) 1 / 2 - - - ( 1 )

[0017] where N is the electron density of the discharge plasma, ε 0 is the dielectric constant in vacuum, e is the electric charge of electrons, and m is the mass of electrons. Due to the existence of t...

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Abstract

The invention discloses a discharge plasma electron density measuring device and a method. The device comprises a detecting light source, a two-quadrant detector and a signal processor. The detecting light source and the two-quadrant detector are respectively placed on two rotating translation stages and respectively arranged at two ends of a discharge device, and a laser of the detecting light source aims at the center of the two-quadrant detector. The fact that the detecting light source and the two-quadrant detector move the same distance in the same dimension is repeated for times, and the response amplitude ratio of two photosensitive surfaces of the two-quadrant detector at different positions is recorded when power is discharged. Then, the discharge plasma electron density distribution on the dimension is calculated according to the response amplitude ratio of the two photosensitive surfaces by the signal processor. The discharge plasma electron density measuring device and the method overcome the defects of the complex system structure and expansive equipment of a traditional measuring device, and meanwhile can effectively improve measuring precision, do not interfere with discharge plasmas, and obtain the space distribution of the discharge plasma electron density.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and relates to a device for measuring the electron density of discharge plasma, in particular to a device for measuring the electron density of discharge plasma based on a two-quadrant photodetector. This method is especially suitable for the measurement of the electron density of the discharge plasma in the gas laser. Background technique [0002] As one of the most common low-temperature plasma generation methods, gas discharge has a wide range of applications in the fields of material processing, surface modification, cutting, welding, biomedicine, and gas laser pumping. Electron density is an important index to measure plasma, which directly affects the effect of discharge plasma in various applications. For example, in gas laser pumping applications, the electron density determines the number density of upper-level particles that can be pumped, which in turn determines the outpu...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/00
Inventor 杨晨光李斌左都罗王新兵陆培祥唐建徐勇跃刘力
Owner HUAZHONG UNIV OF SCI & TECH
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