Fluid pressure measurement sensor based on high polymer thin film

A technology of polymer film and measurement sensor, which is applied in the direction of fluid pressure measurement using capacitance changes, etc., can solve the problems of destroying the integrity of the device, sealing, small pressure measurement range, poor temperature stability, etc., to ensure integrity And firmness, low cost, long service life

Inactive Publication Date: 2013-05-08
ZHEJIANG UNIV
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  • Summary
  • Abstract
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Problems solved by technology

However, MEMS pressure sensors still have some shortcomings, such as complex process, high cost, small pressure measurement range, poor temperature stability, etc.
In addition, pressure measurement devices based on MEMS pressure sensors often need to add pressure transmission holes in the device casing, which destroys the integrity and sealing of the device, and is easy to damage and cause leakage in a high-pressure environment

Method used

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  • Fluid pressure measurement sensor based on high polymer thin film
  • Fluid pressure measurement sensor based on high polymer thin film
  • Fluid pressure measurement sensor based on high polymer thin film

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Embodiment Construction

[0027] The core of the present invention is to provide a fluid pressure measurement sensor and measurement method based on a polymer film. The sensor is small in size, simple in structure, and low in cost. The hidden danger of leakage in the pressure mode is eliminated, and the design difficulty of the fluid pressure measurement system is significantly reduced.

[0028] The present embodiment will be described in detail below in conjunction with the accompanying drawings.

[0029] figure 1 It is a fluid pressure measurement sensor based on a polymer film according to the present invention. like figure 1 As shown, the fluid pressure measurement sensor based on the polymer film of the present invention includes: a first metal electrode sheet 1, a polymer film 2, a second metal electrode sheet 3 and a wire 4, the first metal electrode sheet 1 and the second metal electrode sheet 3 are closely attached to the upper and lower surfaces of the polymer film 2 respectively, forming ...

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Abstract

The invention discloses a fluid pressure measurement sensor based on a high polymer thin film and a measuring method thereof. The sensor comprises two metal electrode thin sheets, and one high polymer thin film is clamped between the two metal electrode thin sheets to form a capacitor. The high polymer thin film can feel pressure imposed by fluid and change thickness, the gap between the two metal electrode thin sheets is changed due to the thickness change, and thus the capacitance between the two metal electrode thin sheets is changed, and the pressure of the fluid can be calculated through detecting the variable quantity of the capacitance. The fluid pressure measurement sensor based on high polymer thin film is small in size, simple in structure, and low in cost, and supplies an effective way to solve the problem of fluid pressure measurement.

Description

technical field [0001] The invention relates to the technical field of fluid pressure measurement, in particular to a pressure measurement sensor and a measurement method inside a high-pressure fluid. Background technique [0002] Fluid widely exists in petroleum, natural gas, chemical process, water conservancy engineering, agricultural irrigation and other fields, and fluid pressure, as an important parameter, plays an extremely important role in mastering the working conditions of equipment and ensuring the normal operation of equipment. [0003] At present, there are many kinds of fluid pressure measurement devices, and the common small pressure sensors are MEMS pressure sensors. Current MEMS pressure sensors include piezoresistive pressure sensors and capacitive pressure sensors, both of which are sensors fabricated on silicon wafers. Compared with traditional mechanical sensors, MEMS pressure sensors have the advantages of small size and integration. However, MEMS pr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/12
Inventor 王保良柴马竞冀海峰黄志尧李海青
Owner ZHEJIANG UNIV
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