Fluid pressure measurement sensor based on high polymer thin film

Abstract

The invention discloses a fluid pressure measurement sensor based on a high polymer thin film and a measuring method thereof. The sensor comprises two metal electrode thin sheets, and one high polymer thin film is clamped between the two metal electrode thin sheets to form a capacitor. The high polymer thin film can feel pressure imposed by fluid and change thickness, the gap between the two metal electrode thin sheets is changed due to the thickness change, and thus the capacitance between the two metal electrode thin sheets is changed, and the pressure of the fluid can be calculated through detecting the variable quantity of the capacitance. The fluid pressure measurement sensor based on high polymer thin film is small in size, simple in structure, and low in cost, and supplies an effective way to solve the problem of fluid pressure measurement.

Description

technical field [0001] The invention relates to the technical field of fluid pressure measurement, in particular to a pressure measurement sensor and a measurement method inside a high-pressure fluid. Background technique [0002] Fluid widely exists in petroleum, natural gas, chemical process, water conservancy engineering, agricultural irrigation and other fields, and fluid pressure, as an important parameter, plays an extremely important role in mastering the working conditions of equipment and ensuring the normal operation of equipment. [0003] At present, there are many kinds of fluid pressure measurement devices, and the common small pressure sensors are MEMS pressure sensors. Current MEMS pressure sensors include piezoresistive pressure sensors and capacitive pressure sensors, both of which are sensors fabricated on silicon wafers. Compared with traditional mechanical sensors, MEMS pressure sensors have the advantages of small size and integration. However, MEMS pr...

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Problems solved by technology

However, MEMS pressure sensors still have some shortcomings, such as complex process, high cost, small pressure measurement range, poor temperature stability, etc.

In addition, pressure measurement devices based on MEMS pressure sensors often need to add pressure transmission holes in the device casing, which destroys the integrity and sealing of the device, and is easy to damage and cause leakage in a high-pressure environment

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