Constant temperature and humidity film coating machine

Abstract

The invention discloses a constant temperature constant humidity pulling coating machine, which comprises a pedestal, a coating chamber, a transmission apparatus, a warm humid induction apparatus and a motor, a clamp used for clamping a coating substrate workpiece is arranged in the coating chamber, a pulling rope is provided on the clamp, the pulling rope is wound on a motor driving shaft and is used for synchronously driving the clamp to perform the elevating motion, a heating groove is provided at the lower part of the coating chamber, the heating groove is connected with a heating stirring device which is provided on the pedestal and can control the temperature and the stirring speed of a sol-gel solution to be coated, a warm humid detector is provided at the central section of the coating chamber, an air inlet capable of being communicated with the required gas and a gas discharge vent capable of discharging the superfluous gas are provided at the rear part of the coating chamber, and the air inlet is connected to a gas cylinder with the required gas by experiments through the controllable devices such as a pressure-reducing valve. The constant temperature constant humidity pulling coating machine has the advantages that during a film forming process, the surrounding atmosphere types, the temperature and humidity and the coating solution temperature are controllable, the pulling speed is speed and continuously adjustable, the constant temperature constant humidity pulling coating machine is easy to be operated, and can accurately and effectively ensure the film quality and film forming quality.

Description

technical field [0001] The invention relates to a workpiece film forming device, in particular to a constant temperature and humidity film coating machine used in a laboratory. Background technique [0002] In recent years, with the rise of the solar photovoltaic industry, the laboratory's research on semiconductors and conductive films has accelerated. Using the dipping film technology to form a film on glass, flexible substrates and other substrates to change the performance of the substrate and endow it with the function of high photoelectric conversion efficiency has been widely used in the laboratory. With the in-depth study of thin films, the requirements for the performance, preparation process and repeatability of the thin films are increased, and the constant temperature of the coating solution and the properties of the surrounding atmosphere, temperature and humidity during the film formation process need to be precisely controlled. The performance requirements of...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a constant temperature and humidity pulling film coating machine, which not only has a simple structure , easy to operate, and the pulling is stable and the speed is adjustable, which can accurately and effectively ensure that the quality of the film and the quality of the film are uniform

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