Device for improving stability of deep ultraviolet laser

Abstract

The invention relates to a device for improving output stability of a deep ultraviolet laser. The device for improving the output stability of the deep ultraviolet laser comprises a deep ultraviolet frequency conversion crystal device, a metal device housing, cooling mediums and a temperature controller, wherein the deep ultraviolet frequency conversion crystal device is stuck between two rectangular prisms by deep ultraviolet frequency conversion crystals, the deep ultraviolet frequency conversion crystal device and the two rectangular prisms are combined together through the metal device housing, the rectangular prisms are cut according to a matching angle of the deep ultraviolet frequency conversion crystals and refractive indexes of the deep ultraviolet frequency conversion crystals and rectangular prism materials, incident light perpendicular to a rectangular end face of one rectangular prism enters and satisfies a phase matching condition when enters onto the deep ultraviolet frequency conversion crystals, hollow flow passages are respectively arranged inside the upper and the lower housing walls of the metal device housing, the cooling mediums are placed in the hollow flow passages, the cooling mediums in the hollow flow passages are communicated with the temperature controller, and the temperature controller is used for controlling working temperature of the deep ultraviolet frequency conversion crystals to remain unchanged. Accordingly, the device is simple in structure, stable in performance and practical.

Description

technical field [0001] The invention relates to a device for stabilizing the output of a laser, in particular to a device for improving the output stability of a deep ultraviolet laser with a wavelength below 200nm. Background technique [0002] At present, ultraviolet lasers, especially deep ultraviolet lasers with a wavelength below 200nm, have great application value in the fields of physics, chemistry, materials, information, life, resources, geology and other disciplines, and will promote new developments in interdisciplinary fields. Scientific research equipment urgently needs to be developed, such as: deep ultraviolet laser photoelectron spectrometer, deep ultraviolet laser spectrometer, deep ultraviolet laser microscope, deep ultraviolet laser photochemical reaction instrument, deep ultraviolet laser interferometer, ultraviolet laser (lithography) direct writer, nano-optical Engraved (193nm) deep ultraviolet laser calibration system, etc. In addition, there are many ...

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Problems solved by technology

[0004] 1. The structure is complex and troublesome in implementation: it is necessary to install several devices outside the deep ultraviolet frequency conversion crystal device, and it also needs to flow heat-conducting medium-gas or water, and it needs electrical connection when controlling the temperature, while the deep ultraviolet frequency conversion crystal device It is usually necessary to work in a vacuum or an inert gas environment to eliminate the absorption of deep ultraviolet laser by air, so deep ultraviolet frequency conversion crystals usually work in a sealed vacuum device or a sealed device, in which flowing gas, water , electricity, the structure is more complicated;

[0005] 2. The cooling or temperature control effect is not ideal: a heat sink is installed outside the metal shell, and the heat sink can dissipate heat or cool down. The heat conduction can be transmitted to the metal shell through the heat conduction medium between the heat sink and the metal shell, and then transmitted by the metal shell to the deep ultraviolet frequency conversion crystal and right-angle prism inside the shell, so the cooling or temperature control effect will not be ideal;

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