Method of processing and preparing black Y203 ceramic coating with hydrogen plasma

Abstract

The invention relates to the technical field of manufacture of Y203 ceramic coatings, in particular to a method of processing and preparing a Y203 ceramic coating. The method comprises the following steps: choosing Y203 powder with purity higher than 99.95%, carrying out pre-processing on base materials to be sprayed, carrying out plasma spraying on the base materials through plasma spraying equipment to prepare the Y202 coating, and carrying out hydrogen plasma processing on the prepared Y203 coating in the last step to obtain a black Y203 coating. The black Y203 coating prepared through a hydrogen plasma reduction method is etching resisting and dirty resisting, and low in cost.

Description

technical field [0001] The present invention relates to Y 2 o 3 The technical field of ceramic coating manufacturing, specifically relates to a kind of plasma hydrogen treatment to prepare black Y 2 o 3 Methods of ceramic coating. Background technique [0002] At present, the low-temperature plasma microfabrication method is the key technology for micro-nano processing of materials. It is the basis of preparation technologies such as microelectronics, optoelectronics, micromechanics, and micro-optics. One of the processes is completed by means of plasma processing, such as plasma film deposition, plasma etching, and plasma deglue. Among them, plasma etching is one of the most critical processes, and it is an irreplaceable process to realize the high-fidelity transfer of micro-patterns in VLSI production from photolithographic templates to silicon wafers. [0003] During the etching process, due to the presence of a large number of highly corrosive active free radicals (...

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Problems solved by technology

Entering the 300mm equipment, as the plasma power increases, the plasma damages the etching process cavity wall more and more, making the following problems prone to occur during the etching process: (1) particles; (2) process The cavity wall coating peels off, causing the plasma to directly interact with the aluminum substrate; (3) Al 2 o 3 Component life limited by higher power

[0008] Black Y can be well prepared by laser radiation or electron beam radiation. 2 o 3 Coating, Y after laser beam irradiation or electron beam irradiation 2 o 3 The coating powder is melted and recombined, the binding force between the bonds is enhanced, the chemical activity is significantly improved, and the Vickers hardness is increased, so that the wear resistance is better, but the cost is higher

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