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Device for atmospheric plasma digital control processing of free curved surface optical parts

A technology of optical parts and plasma, which is applied in the field of plasma processing of large-diameter aspheric optical parts, can solve the problems of processing efficiency and surface quality of high-precision large-diameter aspheric optical parts, and achieve stable and controllable processing, reduce The cost of use, the effect of avoiding surface residual stress and subsurface damage

Active Publication Date: 2015-07-01
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a device for atmospheric plasma numerical control machining of free-form surface optical parts, in order to solve the processing efficiency and surface quality problems of high-precision large-diameter aspheric optical parts

Method used

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  • Device for atmospheric plasma digital control processing of free curved surface optical parts
  • Device for atmospheric plasma digital control processing of free curved surface optical parts
  • Device for atmospheric plasma digital control processing of free curved surface optical parts

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specific Embodiment approach 1

[0018] Specific implementation mode one: combine figure 1 As shown, it consists of a large-caliber plasma torch 1, a medium-caliber plasma torch 2, a small-caliber plasma torch 3, a five-axis linkage CNC machine tool 4, a radio frequency power supply 5, and a mixed plasma gas source 7;

[0019] A large-diameter plasma torch 1 or a medium-diameter plasma torch 2 or a small-diameter plasma torch 3 is installed on the insulating work frame 4-1 of the five-axis linkage CNC machine tool 4, and the large-diameter plasma torch 1 or medium-diameter plasma torch 1 or medium-diameter The plasma torch 2 or the small-diameter plasma torch 3 can be connected with the output end of the radio frequency power supply 5 as the anode of the atmospheric plasma discharge; the optical part 6 to be processed is clamped on the ground electrode 4-2, and the ground electrode 4- 2. Fixed on the horizontal motion table 4-3 of the five-axis linkage CNC machine tool 4; ground the ground electrode 4-2 as th...

specific Embodiment approach 2

[0025] Specific implementation mode two: combination figure 2Explain that the difference between this embodiment and the specific embodiment one is that the discharge working surface of the large-diameter plasma torch 1 is a square plane or a circular plane, and its material is aluminum, and it is connected with the output end of the radio frequency power supply 5 as a The anode of the atmospheric plasma discharge is provided with an air inlet 1-1 at its side position, and the air inlet 1-1 is connected with the air outlet of the air guide hole 4-4 on the insulating work frame 4-1; when the large diameter When the plasma torch 1 is used for atmospheric plasma processing, the flow rate of the plasma gas is 2L / min-5L / min, the gas flow rate of the reaction gas is 20ml / min-90ml / min, and the ratio of the flow rate of the auxiliary gas to the reaction gas is 0 %-50%, the added RF power range is 200W-400W. Other compositions and connections are the same as in the first embodiment. ...

specific Embodiment approach 3

[0026] Specific implementation mode three: combination image 3 Explain that the difference between this embodiment and the first embodiment is that the plasma torch 2 with a medium diameter is composed of an inner electrode A1, a circular polytetrafluoroethylene connection block A2, a circular insulating fixing sleeve A3, a hollow circular ring Consists of external electrode A4 and circular tube ceramic nozzle A5;

[0027] The upper end surface of the circular polytetrafluoroethylene connecting block A2 is provided with an air inlet A2-2 connected with the inner hole A2-1 of the circular polytetrafluoroethylene connecting block A2, and the circular insulating fixing sleeve A3 is provided with There are a plurality of ventilation holes A3-1, and a cooling cavity A4-1 is provided inside the hollow circular outer electrode A4; the upper end of the inner electrode A1 is embedded in the inner hole A2-1 of the circular PTFE connection block A2 In the upper end, the ring-shaped ins...

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Abstract

The invention relates to a device for atmospheric plasma digital control processing of free curved surface optical parts, belongs to the technical field of plasma processing large-caliber aspheric optical parts, and aims to solve the problems of processing efficiency and surface quality of high-precision large-caliber aspheric optical parts. The device is characterized in that a large-caliber plasma torch or a medium-caliber plasma torch or a small-caliber plasma torch is mounted on an insulating work frame of a five-axis linkage numerical control machine tool; an optical part to be processed is clamped on an earth electrode; the large-caliber plasma torch or medium-caliber plasma torch or small-caliber plasma torch respectively performs atmospheric plasma digital control processing on the to-be-processed surfaces of the optical parts to be processed According to the invention, different types of plasma torch can be adopted for atmospheric plasma processing.

Description

technical field [0001] The invention belongs to the technical field of plasma processing large-diameter aspheric optical parts. Background technique [0002] With the development of modern optical technology, not only the requirements of ultra-low surface roughness, ultra-high surface precision and minimizing surface damage are put forward for the optical surface, but also the surface geometry of optical parts is becoming more and more complex. Traditional contact processing methods can generate residual stress on the surface of optical parts, which can cause subsurface damage. Atmospheric plasma processing is based on the chemical reaction between particles. This non-contact processing method can avoid subsurface damage and help improve the surface quality of parts. However, the current atmospheric plasma polishing device adopts a three-axis linkage control system, which only has three degrees of freedom in the horizontal X direction, vertical Y direction, and B direction ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K10/00
Inventor 王波李娜姚英学李国金会良辛强金江李铎
Owner HARBIN INST OF TECH
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