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Micro-lens array with filtering function and preparation method thereof

A microlens array and microlens technology, applied in the field of optics, can solve problems such as increasing system complexity, and achieve the effects of novel technology, improved imaging quality, and reduced system complexity and cost

Active Publication Date: 2013-07-24
GUANGZHOU INST OF ADVANCED TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This increases the complexity of the system structurally and is limited in some applications

Method used

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  • Micro-lens array with filtering function and preparation method thereof
  • Micro-lens array with filtering function and preparation method thereof
  • Micro-lens array with filtering function and preparation method thereof

Examples

Experimental program
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Embodiment 1

[0056] Embodiment 1 of the present invention provides a method for preparing a microlens array, see figure 1 , figure 2 , the method includes the steps of:

[0057] Step 101: Prepare different filter regions on the substrate.

[0058] Specifically, this step 101 includes the following steps:

[0059] Step 1011: Provide a base.

[0060] Preferably, a piece of glass with high light transmittance and flat surface is used as the substrate 1 .

[0061]Specifically, the substrate 1 is cleaned with water and acetone, and then placed in an oven and baked at 130° C. for 10 minutes to remove water vapor and residual acetone; after natural cooling, the color photoresist 2 is spin-coated on the Put the substrate covered with color photoresist in an oven and bake it at 85°C for 2 minutes to remove the solvent in the photoresist. Complete the preparatory work for filter preparation.

[0062] Step 1012: Expose the filter area to be preserved on the substrate.

[0063] Specifically, u...

Embodiment 2

[0085] Embodiment 2 of the present invention provides a microlens array with light filtering function, see image 3 , the microlens array includes a substrate 1 , a color photoresist 2 and a microlens 12 which are sequentially stacked and connected.

[0086] Preferably, a piece of glass with high light transmittance and flat surface is used as the substrate 1 .

[0087] Specifically, the color photoresist 2 is spin-coated on the cleaned glass substrate; under the pre-prepared mask, the filter area that needs to be preserved is exposed by ultraviolet light; the substrate 1 is developed in a special developer solution. The excess unexposed color photoresist is used to make a filter area of ​​a certain color.

[0088] Further, the positive photoresist is spin-coated on the substrate with the filter region, and after pre-baking, the substrate with the photoresist is placed under the pre-prepared circular hole mask for ultraviolet exposure. The exposed substrate was placed in a 5...

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Abstract

The invention discloses a micro-lens array with a filtering function and a preparation method of the micro-lens array, and belongs to the optical field. The preparation method of the micro-lens array comprises the following steps: different filtering areas are prepared on a substrate; the substrate is further exposed; a cylindrical pattern is photoetched on the substrate; and the micro-lens array is prepared through a photoresist heat-melting method. According to the micro-lens array with the filtering function and the preparation method of the micro-lens array, color photoresist is combined with a traditional photoetching method, the filtering areas with the filtering function are prepared on the substrate by utilizing an alignment mark of a mask, then the micro-lens array is directly prepared in the areas in a heat-melting mode, so that the micro-lens array integrates the filtering function, a layer of optical filter structure is eliminated, integration degree is high, imaging quality is improved, and the problem of alignment integration between an optical filter and the micro-lens array is avoided at the same time. The micro-lens array with the filtering function can be applied to a multi-spectrum imaging system, achieves single-color imaging and multi-color reconstitution, largely lowers complexity and cost of the system, and is simple in manufacturing process, novel in technique and high in success rate.

Description

technical field [0001] The invention relates to the field of optics, in particular to a microlens array with light filtering function and a preparation method thereof. Background technique [0002] The microlens array is an array composed of lenses with a clear aperture and a relief depth of micron. It not only has the basic functions of traditional lenses such as focusing and imaging, but also has the characteristics of small unit size, high integration, and multi-channel. It enables it to complete the functions that traditional optical components cannot complete, and can form many new optical systems. [0003] In some practical applications, sometimes people only care about the imaging of a certain monochromatic light. For example, what needs to be concerned about in human blood vessel imaging is the image formed by blue light, which requires the use of multispectral imaging systems. People use the combination of multi-channel integrated color filter and micro-lens array...

Claims

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Application Information

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IPC IPC(8): G02B3/00G02B5/20G03F7/00
Inventor 邸思金建姚豫培陈贤帅杜如虚
Owner GUANGZHOU INST OF ADVANCED TECH CHINESE ACAD OF SCI
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