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A kind of grinding method of germanium substrate sheet of solar cell

A technology of solar cells and grinding methods, applied in grinding devices, grinding machine tools, metal processing equipment, etc., can solve the problems of difficulty in control, uneven force on Template, and uneven drop of wafers, and achieve uniform grinding pressure and easy processing. Control, high precision grinding effect

Active Publication Date: 2016-06-22
中锗科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional manual grinding uses a template to manually grind the wafer, and because the force applied by individuals cannot be completely consistent, resulting in uneven force on the template, resulting in uneven wafer drop, which is difficult to control, and the TTV of the chip is also relatively low due to uneven force. Poor, which will affect the subsequent polishing, the chip debris rate is very high, and the manual grinding efficiency of manual plate by plate is also very low

Method used

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  • A kind of grinding method of germanium substrate sheet of solar cell
  • A kind of grinding method of germanium substrate sheet of solar cell

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Example 1: The incoming germanium sheet is 4 inches, the thickness is 285μm, the double-sided grinding machine model X61850B-1 (Lanzhou Ruide), such as figure 1 , figure 2 As shown, using the star wheel 3 with a specification of 13DPb×0.25×φ100.5mm, the grinding method includes the following steps:

[0025] Firstly, debug the grinding machine to detect the beating of the upper end surface of the lower grinding disc 2 so that the beating of the lower grinding disc 2 is not greater than 0.06mm, and at the same time, ensure that the pressure value of each grinding stage of the grinder does not exceed the system of the upper grinding disc 1. Weight, otherwise the grinder cannot operate normally.

[0026] Secondly, the preparation of the grinding solution: mix 2 parts of aluminum oxide powder and 7 parts of pure water according to the weight ratio. After stirring for 10 minutes, add 0.6 parts of detergent, and then stir for 10 minutes to make the three evenly mixed and avoid Agg...

Embodiment 2

[0037] The incoming germanium sheet is 6 inches, the thickness is 320μm, and the double-sided grinding machine model X61850B-1 (Lanzhou Ruide), such as figure 1 , figure 2 As shown, using the star wheel 3 with a specification of 13DPb×0.28×φ151.5mm, the grinding method includes the following steps:

[0038] First, debug the grinding machine to detect the beating of the upper end surface of the lower grinding disc 2 so that the beating of the lower grinding disc 2 is not more than 0.06mm, and at the same time, ensure that the pressure value of each grinding stage of the grinder does not exceed the system of the upper grinding disc 1. Weight, otherwise the grinder cannot operate normally.

[0039] Secondly, the preparation of the grinding solution: mix 2.5 parts of aluminum oxide powder and 7 parts of pure water according to the weight ratio. After stirring for 10 minutes, add 0.8 parts of detergent and stir for another 10 minutes to make the three uniformly mixed and avoid Agglomer...

Embodiment 3

[0050] The incoming germanium sheet is 8 inches, the thickness is 400μm, the double-sided grinding machine model X61850B-1 (Lanzhou Ruide), such as figure 1 , figure 2 As shown, the star wheel 3 with a specification of 13DPb×0.35×φ202.5mm is adopted, and the grinding method includes the following steps:

[0051] First, debug the grinding machine to detect the beating of the upper end surface of the lower grinding disc 2 so that the beating of the lower grinding disc 2 is not more than 0.06mm, and at the same time, ensure that the pressure value of each grinding stage of the grinder does not exceed the system of the upper grinding disc 1. Weight, otherwise the grinder cannot operate normally.

[0052] Secondly, the preparation of the grinding solution: mix 3 parts of aluminum oxide powder and 7 parts of pure water according to the weight ratio, stir for 10 minutes, add 1 part of detergent, and stir for 10 minutes to make the three evenly mixed and avoid Agglomerate, to be used for ...

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Abstract

The invention discloses a method for grinding a germanium substrate sheet of a solar cell. A star wheel is sequentially placed on a lower grinding plate in a clockwise direction, so that the star wheel is connected to the inner ring gear at the center of the lower grinding plate and the ring gear at the edge of the lower grinding plate. The outer ring gears are meshed, put the main surface of the germanium piece downwards into the grooves of the planetary wheel respectively; put down the upper grinding plate to make it close to the upper surface of the lower grinding plate and the upper surface of the planetary wheel, and pour the grinding liquid into the upward grinding plate, The grinding liquid flows through the through hole of the upper grinding plate to the germanium sheet of the planetary wheel; start the grinding machine, and the grinding process is divided into light pressure, medium pressure, low pressure and repairing stages; the grinding surface of the upper and lower grinding plates and the role of the grinding liquid Under high pressure, the grinding pressure is uniform, so the processing amount of germanium slices is easy to control, and the grinding precision is high. The amount of germanium slices lost during the grinding process is 12-15 μm. Compared with manual grinding, TTV can be controlled within 2 μm, and the roughness can be controlled within 0.8 μm. In addition, the grinding efficiency is twice that of manual grinding, and the fragmentation rate is 1 / 10 of that of manual grinding.

Description

technical field [0001] The invention relates to a germanium substrate sheet of a solar cell, in particular to a grinding process for a solar germanium substrate sheet. Background technique [0002] In the production of solar photovoltaic cells, using germanium sheets as energy conversion elements can achieve an energy conversion efficiency of more than 30%. However, the development of solar cells requires an increasing chip area on the one hand, and on the other hand, in order to form a PN junction with good performance, This large-area semiconductor workpiece must also be ground and polished. If these large-area germanium wafers have a better surface roughness, they can obtain higher imaging quality and greatly improve the energy conversion rate. Therefore, there is an urgent need for a The technology meets the needs of germanium wafers in the field of actual production and scientific research. In the process of producing solar germanium substrates, the grinding process is...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/07B24B37/34
Inventor 王卿泳孙小华郭德文赵双艳
Owner 中锗科技有限公司
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