Method for manufacturing thin film transistor and thin film transistor

Abstract

The invention discloses a method for manufacturing a thin film transistor. The method comprises the steps of providing a substrate, forming the grid electrode of the thin film transistor on the surface of the substrate, depositing a first grid electrode insulating layer on the grid electrode and the surface of the substrate, forming a first grid electrode insulating layer opening in an area above the grid electrode, depositing a second grid electrode insulating layer on the grid electrode and the first grid electrode insulating layer, depositing a semiconductor layer on the surface of the second grid electrode insulating layer to form a silicon island arranged on an area above the grid electrode, and depositing a second metal layer on the silicon island and the surface of the second grid electrode insulating layer to form the source electrode and the drain electrode of the thin film transistor. The thickness of the grid electrode insulating layers is the thickness of the second grid electrode insulating layer in an area with the thickness of a grid electrode insulating film needing to be reduced. The thickness of the grid electrode insulating layers is the superposition of the thickness of the first grid electrode insulating layer and the thickness of the second grid insulating layer in an area with the thickness of the insulating film needing to be increased. The problems of the waveform deformation of signals output by an integrated circuit driving the thin film transistor and time delay can be avoided.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a manufacturing method of a thin film transistor and the thin film transistor. Background technique [0002] The information society increasingly needs thin and portable display devices, and the most mature product at present is a liquid crystal display device (Liquid Crystal Display, LCD). A liquid crystal display is composed of a liquid crystal panel and a backlight module. Among them, the liquid crystal panel is composed of an array substrate, a color filter substrate and a liquid crystal layer located between the two substrates, and a full-color display effect can be achieved by means of the color filter. [0003] The array substrate includes a thin film transistor array, such as figure 1 and figure 2 As shown, the existing liquid crystal display device includes: a glass substrate 100, on which a gate 110 and a scanning line 111 are arranged on the surf...

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Problems solved by technology

[0012] In view of this, the object of the present invention is to provide a method for manufacturing a thin film transistor and a thin film transistor to solve the problem of reducing the thickness of the gate insulating layer at the overlapping area of ​​th

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