High-frequency Shack-Hartmann wave-front measuring device and measuring method thereof
A measurement device and measurement method technology, applied in the field of optical measurement, can solve the problems of low measurement frequency and poor time response characteristics, etc.
Inactive Publication Date: 2013-09-18
NANJING INST OF ASTRONOMICAL OPTICS & TECH NAT ASTRONOMICAL OBSE
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Problems solved by technology
[0008] The purpose of the present invention is to solve the shortcomings of the existing Shaker-Hartmann wavefront sensor, such as poor time response characteristics and low measurement frequency, and propose a high-frequency three-dimensional summer sensor based on the Geiger avalanche photodiode array (GM_APDs array) detection core Khartmann wavefront measurement device
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Embodiment 1
[0036] Embodiment 1, a high-frequency three-dimensional Shack-Hartmann wavefront measurement device based on the Geiger avalanche photodiode array (GM_APDs array) detection core. Such as figure 1 As shown, the high-frequency three-dimensional Shack-Hartmann wavefront measurement device proposed by the present invention consists of a high-frequency laser 2, a beam splitter 3, a collimator 4, a narrow-band filter 5, a microlens array 6, and an optical fiber bundle 7 , GM_APDs array8 and system control unit. The high-frequency laser 2 is used to generate high-frequency laser pulses to irradiate the measured target 1, and the measured target 1 can be an optical element or the atmosphere. The beam splitter 3 is used to coincide the optical axes of the emitting light path and the receiving light path, and scatter through the surface of the prism to provide a gate-opening signal for counting. The interference filter 4 is used to gate echo signals and filter out stray light, and its...
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A high-frequency Shack-Hartmann wave-front measuring device is composed of microlens arrays and optical fiber bundles. The high-frequency Shack-Hartmann wave-front measuring device is characterized in that a high-frequency laser device, a beam splitter, a collimator lens and an interference filter are arranged in front of a high-frequency Shack-Hartmann wave-front measuring device body sequentially; Geiger avalanche photodiode arrays and a system control unit are arranged at the back of the high-frequency Shack-Hartmann wave-front measuring device body; the output of the Geiger avalanche photodiode arrays is connected with the system control unit. A GM_APDsarray is adopted as a detecting core, wave-front error measurement of a target to be detected is realized by the photon counting inversion method, high frequency and high sensitivity features of the GM_APDsarray is utilized, so that the measuring device has the advantages of short measuring intervals, high accuracy in single measurement, influence on measuring accuracy by environment changes can be reduced effectively, and the high-frequency Shack-Hartmann wave-front measuring device is particularly adaptable to adaptive optical atmospheric wavefront error stratifying measurement.
Description
technical field [0001] The invention relates to a high-frequency three-dimensional Shaker-Hartmann wavefront measurement device and a measurement method based on a Geiger avalanche photodiode array (GM_APDs array). It belongs to the technical field of optical measurement. Background technique [0002] Shack Hartmann is a common wavefront error measurement device, which is widely used in optical testing and astronomical telescope adjustments. It is used in adaptive optics to measure atmospheric wavefront errors and plays an important role in improving the imaging quality of telescopes. effect. Shack Hartman uses a microlens array to divide the entrance pupil into a certain number of sub-apertures. The error of the incident wave surface will cause the change of the focal spot in the sub-aperture. Through the analysis and calculation of the change of these focal spots, each The slope of the incident wavefront of each sub-aperture, and finally fit the complete incident wavefro...
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IPC IPC(8): G01J9/00
Inventor 寇松峰顾伯忠王国民姜翔叶宇徐进任玉斌
Owner NANJING INST OF ASTRONOMICAL OPTICS & TECH NAT ASTRONOMICAL OBSE