Micro-blanking automation device of pulsed laser driven flying sheet loading plate and method thereof

Abstract

The invention discloses a micro-blanking automation device of a pulsed laser driven flying sheet loading plate and a method thereof. The micro-blanking automation device comprises a laser generation system, an automatic forming system and a control system. The laser generation system is composed of a laser controller, a laser emitter and optical fiber. The automatic forming system is composed of an end cover, a focusing lens cone, a machine body, a micro-blanking working platform, a three-dimensional movable chuck, a base, a variable magnetic field device, a rotary table multi-station device, a restraint layer-flying sheet integration sheet, a restraint layer-flying sheet integration sheet storage device and a recovery device. Pulsed laser is used as a forming power source, the restraint layer-flying sheet integration sheet is used for performing transformation between optical energy and mechanical energy, and automation of a micro-blanking technology of the pulsed laser driven flying sheet loading plate is achieved. The automatic forming system is independent relatively, processing accuracy cannot be interfered by the outside, personal error is avoided, a laser optical-path and the micro-blanking working platform are accommodated in the machine body, and safety of experimental operation is improved.

Description

technical field [0001] The invention relates to a micro-punching automation device and method for a pulsed laser-driven flyer to load a thin plate, which belongs to the field of advanced forming of mechanical manufacturing and the field of automatic processing, especially the technical field of micro-electromechanical system (MEMS) parts processing. Background technique [0002] With the rapid development of modern science and technology, and with the continuous improvement of market requirements for technological products, in fields such as aerospace, precision instruments, and biomedicine, the application of micro-devices is becoming more and more extensive, and the demand for micro-components of various materials are increasing, thus promoting a new exploration of the processing technology of micro devices. [0003] Today's MEMS-oriented micromachining technology and technology are developed on the basis of integrated circuits, mainly relying on LIGA, etching, micro-milli...

AI Technical Summary

Problems solved by technology

However, the current device using laser-driven flyer micro-forming technology cannot continuously pulse laser-driven flyer micro-forming, and its mass production is only the forming of multiple dies under one pulse impact, which is not a rapid and continuous mass production in the true sense. Production, and because the workpiece and fixtures need to be re-clamped after a laser shock forming in this device and method, it is bound to bring human errors due to manual operations and affect the processing accuracy

Moreover, the open laser light path also has certain potential safety hazards

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