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Metal inner surface modification device and method

A technology of inner surface and metal, which is applied in the field of plasma surface modification, can solve the problems of axial uneven implant dose, uneven plasma density, uneven implant dose, etc., and achieve the effect of high surface modification efficiency

Inactive Publication Date: 2013-09-25
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since most of the external ion sources are used, the plasma is generated externally, and then diffuses into the interior of the cylinder, which will inevitably cause uneven plasma density inside the tube body, which will also cause axial unevenness of the implanted dose. This phenomenon is more obvious when
In general, the internal electrode method increases the implant energy, but does not provide a solution to the unevenness of the implant dose

Method used

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  • Metal inner surface modification device and method
  • Metal inner surface modification device and method

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Experimental program
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Effect test

Embodiment 1

[0016] like figure 1 As shown, adjust the cathode distance to 5mm, the cathode and anode distance to 20mm, and vacuum to 10 -3 Torr, argon gas was introduced to 0.05 Torr, a DC pulse voltage of 2 kV was added, and the sample was cleaned with plasma for 10 min. Introduce 40% nitrogen, adjust the pressure of the vacuum chamber to 3Torr, add a DC pulse power supply, maintain the discharge current at 0.3A, the substrate temperature is about 500°C, and the reaction time is 2h.

Embodiment 2

[0018] like figure 2 As shown, adjust the cathode distance to 10mm, the cathode and anode distance to 40mm, and vacuum to 10 -3 Torr, pass argon gas to 0.05 Torr, pass water to cool the substrate holder, and the substrate temperature does not exceed 300°C. A DC pulse voltage of 2 kV was added, and the sample was cleaned with plasma for 10 min. Introduce 20% acetylene gas, adjust the pressure of the vacuum chamber to 0.5 Torr, add a DC pulse power supply, maintain the discharge current at 0.2A, and the reaction time is 2h.

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Abstract

The invention discloses a metal inner surface modification device and method and belongs to the technical field of plasma surface modification. The method is characterized by comprising the following steps: generating plasmas on a metal inner surface by utilizing the principle of hollow-cathode discharge, and nitriding or depositing diamond like carbon, so as to improve the hardness, the wear resistance and the corrosion resistance of the metal inner surface; by taking a treated piece as a cathode, arranging the cathode inside, adjusting the distance and the vacuum degree between a workpiece and the cathode to reach the discharge condition, arranging an anode at the periphery of a cathode cavity, and adding a direct current pulse power supply between the anode and the cathode, wherein reaction gas is nitrogen or ammonia gas and carrier gas is argon gas during the nitriding, and the reaction gas is methane or acetylene and the carrier gas is argon gas in the process of depositing a hard carbon film. The method has the effects and advantages of simple process, low cost and high efficiency and is particularly suitable for treating the metal inner surface and pipe fittings of large draw ratios.

Description

technical field [0001] The invention belongs to the technical field of plasma surface modification, relates to surface chemical infiltration and deposition of hard carbon film, in particular to a method for realizing chemical infiltration or thin film deposition on the inner surface of metal, so as to improve the hardness and wear resistance of the inner surface of metal and corrosion resistance and other physical and chemical properties. Background technique [0002] There are many types of workpieces whose inner surface is the working surface, such as engine cylinders, transportation pipes, ion acceleration tubes, gun barrels, inner hole molds and shaft sleeves, etc. These workpieces are often damaged due to inner wall wear and corrosion. The hardness, wear resistance and corrosion resistance of the inner wall of the workpiece, and then improve its working efficiency and life, chemical infiltration or deposition of thin film on the inner wall is a very necessary technical ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/50C23C8/36
Inventor 张贵锋侯晓多邓德伟
Owner DALIAN UNIV OF TECH
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