Silicon micro parallel-connection five-rod mechanism

Abstract

The invention relates to a micro parallel-connection five-rod mechanism manufactured with a silicon micro machining technology. The micro parallel-connection five-rod mechanism is composed of a silicon micro moving rod part (1), a silicon micro moving rod part (2), a silicon micro moving rod part (3), a silicon micro moving rod part (4), flexible hinges (5), anchor points (6) and a reading device (7). The silicon micro moving rod part (1), the silicon micro moving rod part (2), the silicon micro moving rod part (3) and the silicon micro moving rod part (4) form V-girder-type electric heat silicon micro actuators in a paired mode. The reading device (7) is used for measuring micrometric displacement of different positions of the micro parallel-connection five-rod mechanism. The anchor points (6) are used for controlling voltage input by the outside and supporting the moving assemblies. The flexible hinges (5) are used for connection among the assemblies and the mechanism can achieve good flexibility when motion is transmitted. In order to achieve motion of the silicon micro parallel-connection five-rod mechanism, when driving voltage is exerted among the anchor points (6), the V-girder-type electric heat silicon micro actuators composed of the moving assemblies move relatively, so that the mechanism has a certain motion manner.

Description

technical field [0001] The invention relates to a silicon micro-parallel five-bar mechanism, the movable components of which adopt silicon micro-machining technology and are made of semiconductor materials such as polysilicon film or single crystal silicon with high aspect ratio, and the entire structure size is between microns and submillimeters. Background technique [0002] Micro-electro-mechanical system (MEMS) uses semiconductors as structural materials and MEMS micro-machining technology as a means to integrate micro-mechanical actuators, micro-mechanical actuators, and sensing, detection, and signal processing. And other microcircuits are integrated on the same chip, and its feature size is generally in the range of microns to submillimeters. MEMS technology is a multi-disciplinary emerging technology field such as microelectronics, micromechanics, microscale mechanics, microoptics, materials science, physics, chemistry and biology. It is used in space technology, nat...

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Problems solved by technology

[0003] Through literature review and published patent search, there are many researches on macro-scale silicon micro-mechanisms in the prior art, but there are no relevant reports on silicon micro-parallel five-bar mechanisms made of polycrystalline silicon thin films or single crystal silicon

In addition, the current MEMS micro-mechanical mechanisms include micro-actuators, micro-actuators, micro-valves, micro-pumps and various micro-sensor mechanisms, and the silicon micro-parallel five-bar micro-actuator composed of a V-shaped beam electrothermal silicon micro-actuator is used as a driving component. Organization does not appear

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