Octave type short coherence transient phase-shifting interferometer and measurement method used for detecting spherical topographic characteristics

A technology of shape characteristics and phase-shifting interference, which is applied in the direction of measuring devices, instruments, and optical devices, etc., can solve the problems of low measurement accuracy, easy to be affected by environmental factors, and small detection range

Active Publication Date: 2013-10-09
HARBIN INST OF TECH
View PDF5 Cites 19 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problems of the traditional time-domain phase-shifting interferometry device, the detection range of a single measurement is too small, the measureme

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Octave type short coherence transient phase-shifting interferometer and measurement method used for detecting spherical topographic characteristics
  • Octave type short coherence transient phase-shifting interferometer and measurement method used for detecting spherical topographic characteristics
  • Octave type short coherence transient phase-shifting interferometer and measurement method used for detecting spherical topographic characteristics

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach 1

[0027] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT 1. A double-program short-coherence instantaneous phase-shifting interferometer for spherical surface feature detection, which includes a short-coherence laser 1, a spatial filter 2, a beamsplitter prism 3, a fiber coupling mirror 4, and a polarization beamsplitter prism 5. λ / 4 wave plate 6, 4f beam expander system 7, microscope objective lens 8, plane reflector 9, single-mode fiber 10, fiber collimator 11, right-angle reflector 12, corner cube prism 13, λ / 2 wave Sheet 14, polarization beam splitter prism 15, first parallel beam splitter 16, second parallel beam splitter 17, wave plate group 18, polarizer 19, area array CCD20 and computer 21, the linearly polarized laser emitted by short coherent laser 1 After the beam is filtered and expanded by the spatial filter 2, it enters the beam splitting prism 3, and the linearly polarized laser beam is divided into the first reflected light and the first transmitted light by the ...

specific Embodiment approach 2

[0037] Specific Embodiment 2. The difference between this embodiment and the multiple-range short-coherence instantaneous phase-shifting interferometer for spherical surface feature detection described in the specific embodiment 1 is that the first parallel beam splitter 16 The splitting ratio is 1:1.

specific Embodiment approach 3

[0038] Specific Embodiment 3. The difference between this embodiment and the double-range short-coherence instantaneous phase-shifting interferometer for spherical surface feature detection described in Embodiment 1 is that the second parallel beam splitter 17 The splitting ratio is 1:1:1:1.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Core diameteraaaaaaaaaa
Diameteraaaaaaaaaa
Login to view more

Abstract

The invention discloses an octave type short coherence transient phase-shifting interferometer and a measurement method used for detecting spherical topographic characteristics and relates to the technical field of optical detection. The problems that a traditional time domain phase-shifting interference measurement device is narrow in detection range and low in measurement precision and is influenced by environmental factors are solved. The interferometer comprises a short coherence laser, a spatial filter, a beam splitter prism, an optical fiber coupling mirror, a polarization splitting prism, a lambda/4 wave plate, a 4f beam-expanding system, a micro objective, a plane mirror, a single mode optical fiber, an optical fiber collimating lens, a corner cube mirror, a cube-corner prism, a lambda/2 wave plate, a polarization splitting prism, a first parallel beam splitter, a second parallel beam splitter, a wave plate group, a polarizing film, an area array charge coupled device (CCD) and a computer. A positioning relationship among four interference images is obtained through four interference patterns of the area array CCD through the computer, so that the initial phase difference which corresponds to each pixel point in an interference field is solved, the optical path difference is further solved, and the spherical morphology is measured. The interferometer is suitable for detection of spherical topographic characteristics.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to the technical field of optical detection of the three-dimensional shape of space objects. Background technique [0002] As one of the most commonly used component shapes, microspheres are used in many fields such as aerospace, military, industry, and medical treatment. The accuracy of their surface shape has a crucial impact on their performance. Although traditional detection methods, such as atomic force microscopes and confocal microscopes, have high longitudinal measurement accuracy, when the single measurement range is very small and high-precision mechanical scanning motion devices are required to achieve overall three-dimensional shape measurement, they are affected by mechanical motion. The impact of errors is serious, and at the same time, due to the single-point scanning measurement, there are problems such as low detection efficiency, poor lateral resolution,...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01B9/02G01B11/24
Inventor 刘国栋卢丙辉甘雨庄志涛冯博
Owner HARBIN INST OF TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap