Preparation method of narrow graphene nanoribbons

Abstract

A method for making a strip shaped graphene layer includes the following steps. First, a graphene film is located on a surface of a substrate is provided. Second, a carbon nanotube structure is disposed on the graphene film. The carbon nanotube film structure includes a number of carbon nanotubes and a number of strip-shaped gaps between the adjacent carbon nanotubes. Third, the graphene film exposed by the strip-shaped gaps is removed by an electron beam bombardment method.

Description

technical field [0001] The invention relates to a preparation method of graphene nano-narrow ribbons, in particular to a preparation method of aligned graphene nano-narrow ribbons. Background technique [0002] Graphene has a stable two-dimensional lattice structure and excellent electrical properties, and has rapidly become a "star molecule" in the family of carbon materials in recent years. Due to its compatibility with traditional silicon semiconductor processes and the lack of selective growth faced by carbon nanotubes, graphene shows broad application prospects in the field of micro-nano electronic devices, and is expected to become the core material for building next-generation electronic devices . [0003] The shape of graphene sheets determines its energy band structure, which in turn determines its electrical properties, which in turn determine its application potential. At present, a major challenge for the practical application of graphene-based electronic devic...

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Problems solved by technology

[0007] Compared with the prior art, the preparation method of the graphene nano-narrow ribbon provided by the present invention uses the carbon nanotube stretched film structure as a mask, because the carbon nanotube stretched film structure includes a plurality of aligned band gaps and carbon nanotubes Tube bundles, and the width of the aligned banded gaps and carbon nanotube bundles can be adjusted by adjusting the number of layers of the carbon nanotube drawn film in the carbon nanotube drawn film structure and processing the carbon nanotube drawn film with an organic solvent or using a laser Scan the carbon nanotube drawing film and other methods to adjust. Therefore, the size of the graphene nano narrow band obtained by the preparation method of the present invention is easy to control, thereby overcoming the problem that the common photoresist mask cannot change its pattern and size at will after molding. defect

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