Preparation method of narrow graphene nanoribbons

A nano-narrow band, graphene technology, applied in the direction of nanotechnology, nanotechnology, nanotechnology for materials and surface science, etc., can solve the problem that the pattern cannot be changed at will, to overcome the pattern and size, easy preparation, size easy to control effects

Active Publication Date: 2013-10-23
TSINGHUA UNIV +1
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Problems solved by technology

[0007] Compared with the prior art, the preparation method of the graphene nano-narrow ribbon provided by the present invention uses the carbon nanotube stretched film structure as a mask, because the carbon nanotube stretched film structure includes a plurality of aligned band gaps and carbon nanotubes Tube bundles, and the width of the aligned banded gaps and carbon nanotube bundles can be adjusted by adjusting the number of layers of the carbon nanotube drawn film in the carbon nanotube drawn film structure and processing the carbon nanotube drawn film with an organic solvent or using a laser Scan the carbon nanotube drawing film and other methods to adjust. Therefore, the size of the graphene nano narrow band obtained by the preparation method of the present invention is easy to control, thereby overcoming the problem that the common photoresist mask cannot change its pattern and size at will after molding. defect

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  • Preparation method of narrow graphene nanoribbons
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  • Preparation method of narrow graphene nanoribbons

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[0018] Please also refer to figure 1 and figure 2 , the embodiment of the present invention provides a kind of preparation method of graphene nano-narrow belt 10, and this method comprises the following steps:

[0019] S1: provide a substrate 20, the substrate 20 has a first surface 201 and a second surface 202 opposite to the first surface 201, a graphene film 30 is provided on the first surface 201 of the substrate 20, the graphene The film 30 has a third surface 301 away from the substrate 20;

[0020] S2: Provide a carbon nanotube drawn film structure 40, the carbon nanotube drawn film structure 40 includes a plurality of oriented arrayed strip gaps 412 and carbon nanotube bundles 411, and the carbon nanotube drawn film structure 40 is covered on the graphene a third surface 301 of the film 30 away from the substrate 20;

[0021] S3: using reactive ion etching of the carbon nanotube stretched film structure 40 and the graphene film 30 located below the strip gap 412 of...

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Abstract

A method for making a strip shaped graphene layer includes the following steps. First, a graphene film is located on a surface of a substrate is provided. Second, a carbon nanotube structure is disposed on the graphene film. The carbon nanotube structure includes a plurality of carbon nanotube segments and a plurality of strip-shaped gaps between the adjacent carbon nanotube segments. Third, the graphene film exposed by the strip-shaped gaps is removed by a reactive ion etching method.

Description

technical field [0001] The invention relates to a preparation method of graphene nano-narrow ribbons, in particular to a preparation method of aligned graphene nano-narrow ribbons. Background technique [0002] Graphene has a stable two-dimensional lattice structure and excellent electrical properties, and has rapidly become a "star molecule" in the family of carbon materials in recent years. Due to its compatibility with traditional silicon semiconductor processes and the lack of selective growth faced by carbon nanotubes, graphene shows broad application prospects in the field of micro-nano electronic devices, and is expected to become the core material for building next-generation electronic devices . [0003] The shape of graphene sheets determines its energy band structure, which in turn determines its electrical properties, which in turn determine its application potential. At present, a major challenge for the practical application of graphene-based electronic devic...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B31/04B82Y40/00
CPCC01B31/0438B82Y30/00B82Y40/00
Inventor 林晓阳姜开利范守善
Owner TSINGHUA UNIV
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