Superconductivity nanometer single photon detecting chip and preparing process thereof
A single-photon detection and preparation technology, applied in the direction of sustainable manufacturing/processing, semiconductor device, final product manufacturing, etc., can solve the problems of reducing the working band and limiting the application of spectral analysis, etc., achieve a wide working band and increase the probability of photon absorption , a wide range of effects
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[0021] Example: A superconducting nanometer single-photon detection chip of the present invention comprises a substrate 1 , an active layer 2 , an insulating layer 3 and a photon absorption layer 4 .
[0022] The substrate 1 is the substrate of a common superconducting single-photon detection chip, and a MgO sheet or a Si sheet is used in this embodiment.
[0023] The active layer 2 is at least two superconducting nanowires arranged on the upper surface of the substrate 1 in a meandering structure. In this embodiment, the active layer 2 is a superconducting nanowire formed by exposure of a NbN film to an electron beam. The superconducting nanowire has a thickness of 4 nm and a width of 100 nm.
[0024] The photon absorbing layer 4 is a carbon nanotube layer with a thickness greater than 10 nanometers, and is arranged above the active layer 2;
[0025] The insulating layer 3 is an Al2O3 insulating layer, filled between at least two superconducting nanowires, and at the same ...
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