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Parallel confocal annular microstructure measurement device and method based on linear array angular spectrum illumination

A measurement device and microstructure technology, applied in the direction of measurement devices, optical devices, instruments, etc., can solve the problems of background noise enhancement, complex reflection, and measurement accuracy reduction, so as to reduce background noise, improve measurement accuracy, and improve detection The effect of signal strength

Inactive Publication Date: 2013-11-27
HARBIN INST OF TECH
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  • Summary
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  • Claims
  • Application Information

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Problems solved by technology

However, the above three methods converge parallel light beams to the surface of the sample for illumination through a microscope objective lens. When measuring a three-dimensional sample, due to the ups and downs of the surface profile of the sample itself, the converged illumination beam is blocked, which will cause some areas to be unavailable. Illumination or complex reflections will cause the attenuation of the detection signal strength and the enhancement of background noise, which will reduce the measurement accuracy and even make it impossible to measure

Method used

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  • Parallel confocal annular microstructure measurement device and method based on linear array angular spectrum illumination
  • Parallel confocal annular microstructure measurement device and method based on linear array angular spectrum illumination
  • Parallel confocal annular microstructure measurement device and method based on linear array angular spectrum illumination

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specific Embodiment 1

[0035] The structural diagram of the angular spectrum scanning illumination array type confocal annular microstructure measurement device in this embodiment is as follows figure 1 As shown, the light path diagram of angular spectrum scanning illumination is as follows figure 2 As shown, the optical path diagram of quasi-confocal measurement is as follows image 3 shown.

[0036] The measurement device includes an angular spectrum scanning illumination optical path and a quasi-confocal measurement optical path;

[0037] The described angular spectrum scanning illumination light path comprises: linear array LED array 1, imaging lens 2, dichroic prism 3, diaphragm 4 and microscopic objective lens 5; 3. After the microscope objective lens 5, it is parallelly irradiated to the surface of the circularly symmetrical microstructure sample that moves with the three-degree-of-freedom stage 6; the three-degree-of-freedom stage 6 is along the three coordinate axes of the Cartesian coor...

specific Embodiment 2

[0053] The difference between this embodiment and the specific embodiment 1 is that the distance between two adjacent LEDs in the linear LED array 1 is different, and its beneficial effect is that it can be adjusted more precisely within a certain range of illumination angle spectrum.

specific Embodiment 3

[0054] The difference between this embodiment and the specific embodiment 1 is that in the angular spectrum scanning illumination array type confocal annular microstructure measurement method, the sequence of step c preferably double cycle is step c1 and step c2, finally forming M×N Zhang Angular Spectrum Illumination Image. The fastest step c2 is placed on the innermost layer, and the slowest step c1 is placed on the outermost layer. 3D topography reconstruction efficiency.

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Abstract

The invention provides a parallel confocal annular microstructure measurement device and method based on linear array angular spectrum illumination, and belongs to the field of ultraprecise three-dimensional microstructure surface morphological measurement. The device comprises an angular spectrum scanning illumination circuit and a confocal measurement light path, wherein light beams emitted from a linear array LED array are irradiated to the surface of a detected microstructure sample in parallel through an imaging lens, a beam splitter prism and a microscope objective in sequence; a linear array pinhole array is adopted in the imaging part to be matched with a structure of a linear array image sensor. The method comprises the steps that firstly, tomographic images of pixels on a certain radius under different kinds of angular spectrum scanning illumination are obtained; secondly, the principle of confocal three-dimensional measurement is utilized to judge the axial coordinate of each pixel in the radius direction; at last, fitting of the three-dimensional shape of the detected microstructure sample is achieved. According to the parallel confocal annular microstructure measurement device and method, due to the design, optimal illumination angles corresponding to all parts of the detected microstructure sample can be found out, the strength of detection signals is improved, background noise is lowered, and then measurement precision is improved; meanwhile, high-speed measurement is achieved.

Description

technical field [0001] A parallel confocal annular microstructure measurement device and method based on linear array angular spectrum illumination belongs to the field of ultra-precise three-dimensional microstructure surface topography measurement. Background technique [0002] The processing and application of microstructures are mainly reflected in three aspects: microelectronics technology, microsystem technology and micro-optical technology, such as typical applications such as computer chips, biochips and microlens arrays. The common feature of the above-mentioned technologies is that they have a three-dimensional structure, and the size of the functional structure is on the order of micron, submicron or nanometer. development of related industries. With the rapid development of micromachining technology, instruments capable of rapid and non-destructive three-dimensional detection of such samples will have great application prospects. [0003] U.S. Patent US3013467...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 刘俭谭久彬王宇航
Owner HARBIN INST OF TECH
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