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Quasi-confocal Microstructure Measurement Method Based on Array Illumination

A measurement method and angular spectrum technology, which is applied in the field of ultra-precise three-dimensional microstructure surface topography measurement, can solve the problems of complex reflection, measurement accuracy reduction, and background noise enhancement, so as to improve the detection signal strength, improve measurement accuracy, reduce The effect of background noise

Inactive Publication Date: 2015-12-09
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above three methods converge parallel light beams to the surface of the sample for illumination through a microscope objective lens. When measuring a three-dimensional sample, due to the ups and downs of the surface profile of the sample itself, the converged illumination beam is blocked, which will cause some areas to be unavailable. Illumination or complex reflections will cause the attenuation of the detection signal strength and the enhancement of background noise, which will reduce the measurement accuracy and even make it impossible to measure

Method used

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  • Quasi-confocal Microstructure Measurement Method Based on Array Illumination
  • Quasi-confocal Microstructure Measurement Method Based on Array Illumination
  • Quasi-confocal Microstructure Measurement Method Based on Array Illumination

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specific Embodiment 1

[0042] The structural diagram of the quasi-confocal microstructure measurement device based on array illumination in this embodiment is as follows: figure 1 As shown, the light path diagram of angular spectrum scanning illumination is as follows figure 2 As shown, the optical path diagram of quasi-confocal measurement is as follows image 3 shown.

[0043] The measurement device includes an angular spectrum scanning illumination optical path and a quasi-confocal measurement optical path;

[0044] The described angular spectrum scanning illumination light path includes: LED array 1, imaging lens 2, dichroic prism 3, first aperture 4 and microscopic objective lens 5; Behind the microscope objective lens 5, parallel irradiation is carried out to the surface of the microstructure sample to be measured which moves axially with the stage 6;

[0045] The quasi-confocal measurement optical path includes: a stage 6, a microscope objective lens 5, a first aperture 4, a dichroic pris...

specific Embodiment 2

[0060] The difference between this embodiment and the specific embodiment 1 is that in the described angular spectrum scanning quasi-confocal microstructure measurement device based on array illumination, the LED array 1 is arranged at unequal intervals in the horizontal and vertical directions, and its beneficial effect is that it can be The direction is adjusted more precisely within a certain range of illumination angle spectrum.

specific Embodiment 3

[0061] The difference between this embodiment and the specific embodiment 1 is that in the described angular spectrum scanning quasi-confocal microstructure measurement device based on array illumination, the LED arrays 1 are arranged at equal intervals in two directions of 45° and 135° from the horizontal direction. , the beneficial effect is that the diagonal spectrum can be uniformly adjusted in this direction.

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Abstract

The invention relates to an angular spectrum scanning quasi-confocal microstructure measuring device and method based on array illumination and belongs to the field of ultra-precision three-dimensional microstructure surface morphology measurement. The device is designed to be provided with an angular spectrum scanning illumination light path; after sequentially passing through an imaging lens, a beam splitter prism and a microscope objective, beams emitted from an LED array are shone onto the surface of a microstructure sample to be measured in parallel, and different LEDs in the LED array correspond to different angular spectra for illumination. According to the method, tomographic images of all the pixels under scanning illumination of different angular spectra are acquired first, then, on the basis of the confocal three-dimensional measurement principle, the axial coordinate of each pixel is judged, and finally the three-dimensional morphology of the microstructure sample to be measured is obtained through fitting. Due to the design, a corresponding optimum illumination angle can be found for every part of the microstructure sample to be measured, and the device and method avoid the problem that some areas can not be illuminated or complex reflection occurs to the areas, wherein the problem is caused by bumps of the surface profile of the microstructure sample to be measured. Detection signal strength is promoted, background noise is lowered, and measurement precision is improved.

Description

technical field [0001] The invention relates to an angular spectrum scanning quasi-confocal microstructure measurement device and method based on array illumination, belonging to the field of ultra-precise three-dimensional microstructure surface topography measurement. Background technique [0002] The processing and application of microstructures are mainly reflected in three aspects: microelectronics technology, microsystem technology and micro-optical technology, such as typical applications such as computer chips, biochips and microlens arrays. The common feature of the above-mentioned technologies is that they have a three-dimensional structure, and the size of the functional structure is on the order of micron, submicron or nanometer. development of related industries. With the rapid development of micromachining technology, instruments capable of rapid and non-destructive three-dimensional detection of such samples will have great application prospects. [0003] U....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24G02B21/00G02B21/06
Inventor 刘俭谭久彬王宇航
Owner HARBIN INST OF TECH