An integrated control system of magnetic bearing and motor for magnetic levitation molecular pump
A technology of control system and magnetic bearing, which is applied in the direction of control system, AC motor control, electrical components, etc., can solve the problems of large equipment volume, reduced overall equipment reliability, and low module integration, so as to achieve flexible and applicable The effect of wide range, improving the integration and reliability of the whole machine
Active Publication Date: 2015-12-09
BEIHANG UNIV
View PDF7 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] The technical solution problem of the present invention is: to overcome the problem that the motor control circuit part and the magnetic bearing control circuit part are separately designed into two sets of circuit systems in the existing magnetic levitation molecular pump, and the overall equipment volume is too large and the equipment is not high due to the low degree of module integration. Reduce the overall reliability and other issues, in order to reduce the volume of the system equipment, improve system reliability and hardware resource utilization, and reduce design and manufacturing costs
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0025] Such as figure 1 As shown, the present invention includes a DC / DC power module 9, a motor and magnetic bearing integrated control device 21, a first signal isolation and drive circuit 7, a second signal isolation drive and power amplifier circuit 13, a motor power main circuit 20, and a switch type Hall sensor detection circuit 4, motor back EMF zero-crossing detection and conditioning circuit 5, motor current and voltage detection 6, current detection displacement detection circuit 15. The motor power main circuit 20 includes three parts: a three-phase rectifier circuit 1, a Buck chopper voltage regulator circuit 2 and an IGBT three-phase inverter bridge circuit 3; and the motor and magnetic bearing integrated control device 21 includes a switch-type Hall sensor interface circuit 17. Back-EMF zero-crossing signal interface 18, Motor current and voltage sensor signal interface and conditioning circuit 19, Motor control signal interface circuit 8, Magnetic bearing control ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
A magnetic bearing and motor integrated control system for a magnetic suspension molecular pump comprises a DC / DC power module, a motor and magnetic bearing integrated control device, a signal isolation power amplifier circuit, a motor power main circuit, a motor current and voltage detection and counter potential zero-cross detection conditioning circuit, a Hall sensor detection circuit and a magnetic bearing current displacement detection circuit, the motor power main circuit comprises a three-phase rectifying circuit, a Buck chopper control circuit and a three-phase inverter bridge circuit, the motor and magnetic bearing integrated control device comprises a Hall sensor interface circuit, a counter potential zero-cross signal interface, a motor control signal interface circuit, a motor current and voltage sensor signal interface and conditioning circuit, a magnetic bearing control signal and current signal interface, a magnetic bearing displacement signal interface and conditioning circuit and a DSP+FPGA (digital signal processor and field programmable gate array) control unit. The motor and magnetic bearing control system is integrally designed and has the advantages of small size, high hardware resource utilization rate, high reliability and the like.
Description
Technical field [0001] The invention relates to a magnetic bearing and motor integrated control system for a magnetic levitation molecular pump, which is suitable for high-speed rotating machinery based on magnetic levitation motor technology, such as a magnetic levitation molecular pump, and completes the integrated control of the motor and the magnetic bearing. Background technique [0002] The magnetic levitation molecular pump relies on the technical foundation of the traditional mechanical molecular pump, in response to the urgent needs of high-end vacuum equipment, using the advantages of the magnetic levitation motor without contact friction, high speed, no lubrication, and long life, replacing the traditional mechanical bearing support. The motor is designed to design the international advanced level of high pumping speed magnetic levitation compound molecular pump. Magnetic levitation molecular pumps have a wide range of applications, such as high-resolution mass spectro...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): H02P23/00H02P27/08
Inventor 郑世强李超华刘刚毛琨周金祥陈琪
Owner BEIHANG UNIV