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Method for preparing trichlorosilane

A technology of trichlorosilane and chlorosilane, which is applied in the direction of halosilane and silicon halide compounds, can solve the problems that the preparation method of trichlorosilane needs to be improved, and achieve the effects of improving efficiency, reducing costs and improving efficiency

Active Publication Date: 2015-05-20
CHINA ENFI ENGINEERING CORPORATION
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the preparation method of trichlorosilane still needs to be improved at this stage

Method used

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  • Method for preparing trichlorosilane
  • Method for preparing trichlorosilane
  • Method for preparing trichlorosilane

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preparation example Construction

[0091] The above part has described the method for preparing polysilicon of the present invention in detail. In order to better understand the method, the equipment capable of implementing the method will be described in detail below.

[0092] Therefore, according to another aspect of the present invention, the present invention also proposes an equipment for preparing polysilicon. According to an embodiment of the present invention, refer to image 3 , The equipment for preparing polysilicon of the present invention includes: a hydrochlorination synthesis reaction device 1 , a first rectification purification device 2 , a disproportionation reaction device 3 , a second rectification purification device 4 and a pyrolysis reaction device 5 . According to some embodiments of the present invention, the hydrochlorination synthesis reaction device 1 is used to make silicon powder, hydrogen, and at least one selected from hydrogen chloride and silicon tetrachloride undergo a hydroch...

Embodiment 1

[0115] use Figure 3-Figure 11 device shown, refer to figure 1 and figure 2 According to the flow shown in the present invention, according to the method for preparing polysilicon of the present invention, trichlorosilane is prepared according to the following process steps, and then polysilicon is prepared:

[0116] (1) Synthesis step of hydrochlorination: Silicon tetrachloride and hydrogen from the following steps (2) and (3) are mixed in a gas-liquid mixer, then exchange heat with the hydrogenation reactor outlet gas, and enter resistance heating Heating to a certain temperature, the mixed gas directly enters the hydrogenation reactor, the temperature is controlled at 500-550 degrees, the pressure is 1.5-3.5MPa, the ratio of silicon tetrachloride to hydrogen is 1:2-1:5, nickel-based or copper-based Under the action of catalyst, it reacts with silicon powder. After the reaction gas passes through the high-efficiency gas-solid dust collector, it exchanges heat with the ga...

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Abstract

The invention discloses a method for preparing trichlorosilane. The method comprises a step of carrying out hydrochlorination synthesis reaction on ganister sand, hydrogen and at least one material selected from hydrogen chloride and silicon tetrachloride, so as to obtain the trichlorosilane. By using the method, the trichlorosilane can be effectively prepared; the method is simple in process, safe, energy-saving and environment-friendly, low in cost, and high in purity of produced trichlorosilane, and can be effectively applied to production of electronic grade polysilicon; the generated tail gas and waste residue can be recycled, so as to achieve the environmental requirements.

Description

technical field [0001] The invention relates to the technical field of photovoltaic industry, in particular to a method for preparing trichlorosilane. Background technique [0002] As a renewable and clean energy source, solar energy has attracted global attention, and the technology of using solar energy resources to generate electricity has been considered as the most promising new energy technology in the world today. Therefore, the photovoltaic industry with solar power generation technology as the core has developed rapidly in the early 21st century. As the main raw material of the photovoltaic industry, polysilicon has seen a sharp increase in demand with the rapid development of the photovoltaic industry. Furthermore, the demand for trichlorosilane, the main raw material for the production of polysilicon, has also increased. [0003] However, the preparation method of trichlorosilane still needs to be improved at this stage. Contents of the invention [0004] The...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/107
Inventor 张升学万烨严大洲毋克力肖荣辉汤传斌杨永亮
Owner CHINA ENFI ENGINEERING CORPORATION
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