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Device and method for preventing ammonia recovery film assembly from being blocked in MOCVD (Metal Organic Chemical Vapor Deposition) production of gallium nitride

A technology of membrane components and gallium nitride, which is applied in the field of ammonia gas treatment, can solve problems such as easy clogging, and achieve the effects of avoiding clogging and prolonging service life

Inactive Publication Date: 2015-03-11
VISBE XIAMEN ENVIRONMENT TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The present invention provides a device and method for preventing the clogging of the nitrogen recovery membrane module produced by MOCVD to produce gallium nitride.

Method used

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  • Device and method for preventing ammonia recovery film assembly from being blocked in MOCVD (Metal Organic Chemical Vapor Deposition) production of gallium nitride
  • Device and method for preventing ammonia recovery film assembly from being blocked in MOCVD (Metal Organic Chemical Vapor Deposition) production of gallium nitride

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Experimental program
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Effect test

Embodiment 1

[0027] refer to figure 1 A device for preventing the clogging of the ammonia gas recovery membrane module for producing gallium nitride by MOCVD, including a front assembly connected to the ammonia collection pipeline, a pretreatment assembly and a first-stage ammonia absorption assembly, and the front assembly includes blowers 1, Filtration device 2, heat exchanger 3 3. The pretreatment component includes a plate tower 4, an alkaline water tank 5, a circulation pump 2 6 and a heat exchanger 2 7, and the plate tower 4 includes a mixed gas inlet 41, a mixed gas outlet 42, an alkaline water inlet 43 and an alkaline water outlet 44 , the alkaline water inlet 43, the alkaline water tank 5, the circulation pump two 6 and the alkaline water outlet 44 are connected sequentially, the mixed gas inlet 41 is connected with the outlet of the heat exchanger three 3, the mixed gas outlet is connected with the heat exchanger two 7 The inlet is connected, hot water enters at one end of the l...

Embodiment 2

[0029] refer to figure 2 , The main difference between this embodiment and Embodiment 1 is that this embodiment uses a three-stage ammonia gas absorption component. The membrane elements in the first-stage ammonia absorption assembly and the second-stage ammonia absorption assembly in the three-stage ammonia absorption assembly are composed of two sets of membrane elements connected in parallel, and the ammonia absorption assembly at each stage includes a membrane assembly and an ammonia water storage tank 1, heat exchanger 1, circulation pump 1, the membrane module includes an air inlet, an air outlet, a water outlet, a water inlet, an ammonia storage tank, a circulation pump 1, and heat exchanger 1, and the water inlet is connected in sequence, and the first-stage membrane module 12 The air inlet of the first-stage membrane module 12 is connected to the heat exchanger 15, the air outlet of the first-stage membrane module 12 is connected in series with the air inlet of the s...

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Abstract

The invention discloses a device for preventing an ammonia recovery film assembly from being blocked in MOCVD (Metal Organic Chemical Vapor Deposition) production of gallium nitride. The device comprises a front component, a pretreatment component and an ammonia absorbing component, wherein the ammonia absorbing component comprises a film component, an ammonia-water storage tank, a heat exchanger I, a circulating pump I, an absorbing-agent inlet and an absorbing-agent outlet; the film component comprises a gas inlet, a gas outlet, a water inlet and a water outlet; the pretreatment component comprises gas-liquid mass transferring equipment, an alkaline-water tank, a circulating pump II and a heat exchanger II. Before entering an ammonia recovery film component, mixed gas passes through the gas-liquid mass transferring equipment firstly, so as to absorb gas impurities which are contacted with water or alkaline to generate substances slightly or difficultly soluble in water and blocking the film component, is heated and changed into unsaturated wet mixed gas by the heat exchangers to prevent the saturated or oversaturated wet mixed gas from being condensed at air holes of the air side of the ammonia recovery film component and causing water permeation to the film, and finally passes through the ammonia recovery film component. The device disclosed by the invention has the advantages that the blocking of the film component can be effectively avoided and the service life of the ammonia recovery film component is greatly prolonged.

Description

technical field [0001] The invention relates to the field of ammonia gas treatment, in particular to a device and a method for preventing clogging of a nitrogen recovery membrane module for producing gallium nitride by MOCVD. Background technique [0002] Ultra-pure ammonia is an important electronic gas in solar cells, LED light-emitting diodes, and semiconductor industries. Especially in MOCVD equipment, ammonia and trimethylgallium act on sapphire to form gallium nitride light-emitting diodes or LEDs through vapor phase growth. At present, there are thousands of MOCVD furnaces used in the manufacture of LED light-emitting diodes in my country, and each MOCVD uses 40kg of ultra-pure ammonia every day, almost all of which need to be discharged. The national sewage standard is that the content of ammonia nitrogen in wastewater can only be 25mg / L. At present, the more efficient, energy-saving, and environmentally friendly ammonia recovery process is the membrane ammonia...

Claims

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Application Information

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IPC IPC(8): B01D53/18B01D46/00
Inventor 王俊川
Owner VISBE XIAMEN ENVIRONMENT TECH CO LTD
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