Distortion calibration device and method for f-theta optical system
An optical system and a calibrated technology, applied in the field of optical testing, can solve the problems of low measurement accuracy, errors in processing and assembly, and complex target production, and achieve the effects of high measurement accuracy and high work efficiency.
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[0030] The present invention is a kind of distortion testing device of f-theta optical system, including turntable 1, long guide rail 2, composed of light source 4, collimator mirror 5, optical filter 6, condenser mirror 7, star hole plate 8, target miniature mirror 9 Target generator, special tooling 11, image analyzer made up of imaging objective lens 12, detector 13, three-dimensional mobile support 14, computer 15, platform 16, computer 15 includes automatic control software, calculation processing software; target generator setting On the object side of the calibrated optical system, the image analyzer is set on the image side of the calibrated optical system, and the moving parts are connected with the computer, and their movement is controlled by automatic control software.
[0031] The function of the turntable 1 is to drive the target generator to rotate, and provide the target of the off-axis field of view for the f-θ optical system, which can be an electronically con...
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