Plasma etching device

An etching device and plasma technology, applied in discharge tubes, electrical components, circuits, etc., can solve problems such as uneven etching of wafers, and achieve the effects of weakening coherence, uniform electric field distribution, and high etching uniformity

Active Publication Date: 2016-11-30
SEMICON MFG INT (SHANGHAI) CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The problem solved by the present invention is that the plasma etching device in the prior art will produce the problem of uneven etching of the wafer during the etching process

Method used

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Examples

Experimental program
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Effect test

no. 1 example

[0044] refer to figure 2 , in the first embodiment, the plasma etching device includes: a process chamber 28 having an opening 21; a first electrode 22a and a second electrode 24a located in the process chamber 28, and the first electrode is opposite to the second electrode Placement, the first electrode is positioned at the top of the process chamber, wherein the first electrode 22a includes a pole plate 221a and a pole plate 222a; an excitation radio frequency unit, the number of excitation radio frequency units is equal to the number of pole plates, and each pole plate is connected to each pole plate The excitation radio frequency units are electrically connected one to one, and the excitation radio frequency units are used to provide excitation energy to the etching gas in the process chamber through each plate of the first electrode. In this first embodiment, two excitation radio frequency units are included , are respectively the excitation radio frequency unit 251 elec...

no. 2 example

[0055] refer to Image 6 , in the second embodiment, the plasma etching device includes: a low-frequency capacitively coupled RF generator 261 and a DC power supply 262 electrically connected to the second electrode 24b, and the other end of the low-frequency capacitively coupled RF generator 261 and the DC power supply 262 grounded. Among them, the low-frequency capacitively coupled RF generator 261 forms a low-frequency oscillating electric field in the process chamber 28 by providing a bias voltage to the second electrode 24b; form a stable electric field. The low-frequency oscillating electric field and stable electric field propagating in the process chamber 28 can change the movement direction of electrons in the plasma in the process chamber 28, thereby changing the propagation direction of part of the electromagnetic waves generated by the high-speed movement of electrons in the process chamber 28, This can further reduce or even eliminate standing wave effects. The...

no. 3 example

[0059] refer to Figure 7 , in the third embodiment, the second electrode 24c includes two pole plates, namely pole plate 241c and pole plate 242c, wherein, pole plate 241c is electrically connected with one end of the low-frequency capacitive coupling RF generator 261, and the low-frequency capacitive coupling The other end of the RF generator 261 is grounded; one end of the plate 242c is electrically connected to the DC power supply 262, and the other end of the DC power supply 262 is grounded.

[0060] In the third embodiment, the shape and positional relationship of the two plates included in the second electrode 24c are the same as those of the two plates of the first electrode in the first embodiment, and will not be described in detail here. In addition, the number of pole plates of the second electrode is not limited to two pole plates, and may be three or more including three. The number of pole plates of the first electrode is the same as the number of pole plates o...

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PUM

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Abstract

A plasma etching device, comprising: a process chamber; a first electrode and a second electrode located in the process chamber, the first electrode and the second electrode are placed opposite each other, and the first electrode includes at least two plates; Exciting radio frequency units, the number of exciting radio frequency units is equal to the number of pole plates, and each pole plate is electrically connected to each excitation radio frequency unit one-to-one, and the excitation radio frequency unit is used to pass through each pole plate of the first electrode to the process chamber. Etching gas provides excitation energy. By setting the output frequencies of the various exciting radio frequency units to be different, or there is a phase difference between the transmitting radio frequencies of the various exciting radio frequency units, or the frequencies and phases of the transmitting radio frequencies are different, the device can prevent the electromagnetic waves in the process chamber from facing each other. Coherence occurs through propagation to produce standing waves. By weakening or even eliminating the standing wave effect in the process chamber, a high-density uniform plasma can be obtained to achieve uniform etching of large-sized wafers.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a plasma etching device. Background technique [0002] In the prior art, as a commonly used wafer etching process, plasma etching uses an appropriate gas as the etching gas, and excites the etching process through an energy source, such as a high-frequency capacitively coupled RF generator or a high-frequency inductively coupled RF generator. The etchant gas is used to form plasma, and then the plasma is used to etch the area without the photolithography mask to form the required pattern in the wafer. [0003] In the prior art, refer to figure 1 , the plasma etching device mainly includes: a process chamber 18 with an opening 11, which is used for the input of etching gas; an upper plate 12 and a lower plate 14 located in the process chamber 18; a DC power supply 13, one end of which is connected to the The upper plate 12 is connected, and the other end is connected to the high-fr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/32
Inventor 王冬江符雅丽张海洋
Owner SEMICON MFG INT (SHANGHAI) CORP
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