In-doped zinc sulfide thin film and preparation method and application thereof
A technology of thin film and doping amount, which can be used in final product manufacturing, sustainable manufacturing/processing, semiconductor/solid-state device manufacturing, etc. The effect of reducing the resistivity
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[0017] Get 15ml of zinc acetate with a concentration of 0.4mol / L, and 15ml of sodium citrate with a concentration of 0.1mol / L, according to the doping amount of 0 at.%, 0.5 at.%, 1 at.%, 2 at.%, 3 at.%, 4 at.% indium sulfate as doping source. Add 87.5ml of deionized water and mix well. Acetic acid was added dropwise to the solution to adjust the pH of the solution to 4.0.
[0018] Place the solution in a water bath for heating. After the temperature of the solution reached 85° C., 15 ml of thioacetamide with a concentration of 0.4 mol / L was added to the solution. Starting from the time of adding thioacetamide, react at a water bath temperature of 85° C. for 1.5 h.
[0019] The deposited In-doped ZnS film was deposited on N 2 Annealing treatment was carried out in the atmosphere, the temperature of annealing treatment was 350°C, the time of annealing treatment was 1.5 h, and cooled to room temperature.
[0020] Phase analysis of In-doped ZnS thin films.
[0021] figure 1...
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