A device and processing method for electrophoresis-assisted micro-ultrasonic or micro-rotating ultrasonic polishing of micro-holes

A technology of rotating ultrasonic and ultrasonic processing, which is applied in the field of electrophoresis-assisted micro-ultrasonic or micro-rotating ultrasonic polishing micropores, and in the field of polishing micropores. The effect of reducing adverse effects and avoiding repeated positioning errors

Inactive Publication Date: 2016-03-02
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The abrasive working fluid is dispersed between the workpiece and the tool, and the utilization rate of the abrasive is not high, which affects the efficiency of the polishing process, especially for extremely small pores, which is difficult to achieve with abrasive flow

Method used

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  • A device and processing method for electrophoresis-assisted micro-ultrasonic or micro-rotating ultrasonic polishing of micro-holes
  • A device and processing method for electrophoresis-assisted micro-ultrasonic or micro-rotating ultrasonic polishing of micro-holes

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] like figure 1 As shown, an electrophoresis-assisted micro-ultrasonic polishing micropore device includes a micro-ultrasonic machine tool, a working fluid tank 1, an electrophoretic DC power supply 2, a microtool 3, a working fluid 4, ultrafine abrasive particles 5, and a microporous workpiece 6. The electrophoresis auxiliary circular electrode 7; the micro-ultrasonic machine tool includes a spindle system, a power supply system, and a spindle micro-ultrasonic longitudinal vibration system; the electrophoretic DC power supply 2 passes through the power supply system, and its positive pole is connected to the micro tool 3, and its positive pole is connected to the micro tool 3. The negative electrode is connected to the electrophoresis auxiliary circular electrode 7; the ultrafine abrasive particles 5 are distributed in the working fluid 4, and the working fluid 4 is placed in the working fluid tank 1, wherein the average particle diameter of the ultrafine abrasive particl...

Embodiment 2

[0037] like figure 2 As shown, an electrophoresis-assisted micro-rotary ultrasonic polishing micropore device includes a micro-ultrasonic machine tool, a working liquid tank 1, an electrophoretic DC power supply 2, a micro-tool 3, a working liquid 4, ultra-fine abrasive particles 5, and a micro-porous workpiece 6 , electrophoresis auxiliary circular electrode 7; the micro-ultrasonic machine tool includes a spindle system, a power feed system, and a spindle micro-ultrasonic longitudinal vibration system; the electrophoretic DC power supply 2 passes through the power feed system, and its positive pole is connected to the micro tool 3, Its negative electrode is connected to the electrophoresis auxiliary circular electrode 7; the ultrafine abrasive particles 5 are distributed in the working fluid 4, and the working fluid 4 is placed in the working fluid tank 1, wherein the average particle diameter of the ultrafine abrasive particles 5 is less than 1 micron ; The microporous work...

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Abstract

The invention relates to polishing of inner surfaces of metal or non-metal hard and brittle material micropores and particularly relates to a device for polishing the micropores through electrophoresis auxiliary micro-ultrasonic or micro-rotating ultrasonic and a processing method. Electrophoresis auxiliary processing and the micro-ultrasonic processing are combined together; under the adsorption action of electrophoresis, ultra-fine abrasive particles are adsorbed to the surface a fine tool; the fine tool penetrates through a micropore workpiece under the driving of a servo feeding system of a micro-ultrasonic processing machine tool; the fine tool vibrates at high frequency along the axial direction to drive working liquid to disturb severely, so that the ultra-fine abrasive particles can frictionize the inner surface of the micropore workpiece in a sliding manner to fulfill the aim of polishing the micropore workpiece; the polishing of the micropores with the diameters of less than or equal to 100 microns can be realized by implementing the processing of micropore polishing through the electrophoresis auxiliary micro-ultrasonic or micro-rotating ultrasonic; the utilization rate of the ultra-fine abrasive particles is increased, and the roughness of the inner surfaces of the micropores can be reduced.

Description

technical field [0001] The invention relates to the polishing of the inner surface of micropores of metal or non-metallic hard and brittle materials, in particular to an electrophoresis-assisted micro-ultrasonic or micro-rotating ultrasonic polishing micropore device and a micropore polishing method. Background technique [0002] With the continuous development of science and technology, the demand for microstructures, micro components and micro products in electronics, optics, machinery, biotechnology, communication and other industrial fields is increasing day by day. In order to reduce the wear of parts, improve their matching accuracy, improve fatigue strength and corrosion resistance, people have put forward higher and higher requirements for the micro-geometric accuracy and surface roughness of the parts surface, and these requirements have a great impact on finishing technology. The rapid development has played a role in promoting. Nowadays, the design of products te...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B1/04
CPCB24B1/002B24B1/04
Inventor 郭钟宁何俊峰连海山张伟
Owner GUANGDONG UNIV OF TECH
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