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Method for nano-dripping 1D, 2D or 3D structures on a substrate

A substrate, 3D technology, applied in the direction of specific nanostructure formation, microstructure technology, microstructure device, etc.

Inactive Publication Date: 2014-03-05
ETH ZZURICH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Furthermore, neither dots nor 3D structures have been reported to be printed with very high localization accuracy just below 100 nm.

Method used

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  • Method for nano-dripping 1D, 2D or 3D structures on a substrate
  • Method for nano-dripping 1D, 2D or 3D structures on a substrate
  • Method for nano-dripping 1D, 2D or 3D structures on a substrate

Examples

Experimental program
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Embodiment Construction

[0118] This section shows the printing of the proposed 3D submicron structures. In the device, a gold-coated nozzle is filled with ink and is in electrical contact with the ink. A potential is applied between the nozzle and the counter electrode in and / or on and / or below and / or above the substrate to be printed on. Applying a sufficiently high potential between the nozzle and the counter electrode results in a uniform ejection of monodisperse droplets. In this study, the natural and scaling relationships of these droplets are considered. Experiments demonstrate that the frequency increases substantially with the applied potential. Once the charge relaxation time is longer than the liquid feeding time to the small droplet, the droplet diameter decreases substantially and converges to the final value. The applied potential was varied from 100 V to 400 V for the test system used, so that the droplet frequency increased from 60 Hz to 100 KHz while the droplet diameter decreased...

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PUM

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Abstract

A method for the production of nano- or microscaled 1D, 2D and / or 3D depositions from an solution (6), by means of a liquid reservoir (2) for holding the ink with an outer diameter (3,D) of at least 50 nm, is proposed, wherein there is provided an electrode (7,8 or 9) in contact with said ink (6) in said capillary (2), and wherein there is a counter electrode in and / or on and / or below and / or above a substrate (15) onto which the depositions are to be produced, including the steps of: i) keeping the electrode (7, 8, 9) and the counter electrode (15, 18) on an essentially equal potential; ii) establishing a potential difference between the electrode (7, 8, 9) and the counter electrode (15, 18) leading to the growth of an ink meniscus (1) at the nozzle (3) and to the ejection of droplets (13) at this meniscus with a homogeneous size smaller than the meniscus size (11) at a homogenous ejection frequency; keeping the voltage applied while the continuously dried droplets leave behind the dispersed material which leads a structure to emerge with essentially the same diameter as a single droplet, wherein the distance between the substrate (1) and the nozzle (3) is smaller than or equal to 20 times the meniscus diameter at least at the moment of nano-droplet ejection (12); wherein the conductivity of the ink (6) is high enough to stabilize the liquid meniscus during droplet ejection

Description

technical field [0001] The present invention relates to a method for producing 1D, 2D and / or 3D deposits from a liquid loaded with nanoparticles or other solid-phase nanocompounds stably dispersed in a solvent using a nozzle-tip vessel for holding the liquid, wherein in said The nozzle or at the container is provided with an electrode in contact with the liquid, and wherein a counter electrode is present in and / or on and / or below and / or above the substrate on which the deposit is to be produced. Background technique [0002] The controlled and spatially resolved deposition of colored liquids on surfaces is of interest in a large number of different fields, in particular in the field of printing, for the production of microdevices (printed electronics), especially flexible devices. Conductor traces or other functional entities, and in the field of biological and / or chemical detection and substance / sample processing, for the fabrication of photonic devices (such as photonic cr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C99/00
CPCB81C99/0095B81C2201/0184B81C99/00B82B3/0019B81C1/00126H01L21/4867
Inventor 帕特里克·加利克朱利安·施奈德迪莫斯·普利卡科斯瓦希德·桑多达尔穆罕默德·哈迪·埃格利迪
Owner ETH ZZURICH
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