Low-temperature cofiring multilayer piezoelectric ceramic and preparation method thereof
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A technology of piezoelectric ceramics and low-temperature co-firing, which is applied in the field of piezoelectric ceramics, can solve the problems of reducing the piezoelectric performance and mechanical properties of ceramics, and achieve the effect of avoiding large energy consumption
Inactive Publication Date: 2014-03-19
苏州衡业新材料科技有限公司
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However, too much flux will form a non-ferroelectric second phase after sintering, which will eventually reduce the piezoelectric and mechanical properties of ceramics. Therefore, only an appropriate amount of flux and a suitable ceramic formula and sintering process can obtain a multilayer laminate with excellent performance. Electroceramics
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Embodiment 1
[0030] 1. Calculate the amount of powder required according to the chemical ratio in the following multilayer piezoelectric ceramic chemical formula, weigh the corresponding powder and put it into the agate jar;
[0031] yPb(Zr x Ti 1-x )O 3 —(1-y-z)Pb(Mn 1 / 3 Sb 2 / 3 )O 3 —zPb(Zn 1 / 3 Nb 2 / 3 )O 3
[0032] Among them, the x value is 0.40, the y value is 0.60, and the z value is 0.02;
[0033] 2. According to a certain ratio, add agate balls and distilled water, and perform ball milling on a planetary ball mill for 16 hours, and set the speed at 200-300r / min;
[0034] 3. Take out the ball-milled material, dry it, and pass it through a 80-mesh sieve;
[0035] 4. Pre-burn the powder at 860°C for 4 hours;
[0036] 5. Add CuO with a percentage of 0.01% to the pre-burned powder, and perform ball milling again. The ball milling time is 40-48h, and the speed is 200-300r / min;
[0037] 6. Take out the ball-milled material, dry it, and pass it through a 200-mesh sieve;
[0038]...
Embodiment 2
[0049] 1. Calculate the amount of powder required according to the chemical ratio in the following multilayer piezoelectric ceramic chemical formula, weigh the corresponding powder and put it into the agate jar;
[0050] yPb(Zr x Ti 1-x )O 3 —(1-y-z)Pb(Mn 1 / 3 Sb 2 / 3 )O 3 —zPb(Zn 1 / 3 Nb 2 / 3 )O 3
[0051] Wherein, the x value is 0.60, the y value is 0.88, the z value is 0.1, the u value is 0.05, and Wt% represents the percentage content;
[0052]2. According to a certain ratio, add agate balls and distilled water, and perform ball milling on a planetary ball mill for 24 hours, and set the speed at 200-300r / min;
[0053] 3. Take out the ball-milled material, dry it, and pass it through a 80-mesh sieve;
[0054] 4. Pre-burn the powder at 820°C for 6 hours;
[0055] 5. Add CuO with a percentage of 0.05% to the pre-burned powder, and perform ball milling again. The ball milling time is 40-48h, and the speed is 200-300r / min;
[0056] 6. Take out the ball-milled material, ...
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Abstract
The invention relates to a low-temperature cofiring multilayer piezoelectric ceramic. The main material composition is as follows: yPb(ZrxTi(1-x))O3-(1-y-z)Pb(Mn1/3Sb2/3)O3-zPb(Zn1/3Nb2/3)O3, in addition, a proper amount of CuO is added as a fluxing agent to realize multilayer film low-temperature sintering, wherein the x value accounts for 0.40%-0.60%, the y value accounts for 0.60%-0.88%, the z value accounts for 0.02%-0.1%, and the weight percentage of CuO is 0%-0.05%. A multilayer film is prepared by adopting a tape casting method; the high-density multilayer piezoelectric ceramic is obtained by carrying out glue arrangement between 110 DEG C and 500 DEG C and carrying out low-temperature sintering at 830-850 DEG C; the appearance d33 of the piezoelectric multilayer film ceramic with a three-layer structure is more than or equal to 875 Pc/N by being tested through pressure point property and is far more than the d33 value (306 Pc/N) of a single-layer ceramic with same components. The low-temperature cofiring multilayer piezoelectric ceramic disclosed by the invention realizes the low-temperature sintering, prevents the problem of environment pollution caused by the high energy consumption, high cost, component deviation and PbO volatilization of high-temperature sintering, is excellent in piezoelectric property, achieves the d33 more than or equal to 875 Pc/N, the dielectric constant at 3000-6000 and the electromechanical coupling coefficient K31 more than or equal to 0.56 and meets the requirements of a multilayer piezoelectric ceramic device.
Description
technical field [0001] The invention relates to a piezoelectric ceramic, in particular to a low-temperature co-fired multilayer piezoelectric ceramic and a preparation method thereof. Background technique [0002] Piezoelectric ceramics is a functional material that can convert mechanical energy and electrical energy. Its preparation process is relatively simple, the cost is low, and it has stable piezoelectric and mechanical properties. It is widely used in communications, detection, medical, aviation, computer and military industries. and other fields. PZT-based piezoelectric ceramics are still dominant in practical applications because of their convenient manufacture, low cost, excellent electrical properties, and stable performance. However, the sintering temperature of traditional lead-based piezoelectric ceramics is relatively high, generally around 1200-1300°C, and due to the low melting point of PbO, it will volatilize during high-temperature sintering. On the one ...
Claims
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