Co-wiring microelectrode array chip and its preparation method
A microelectrode array and co-wiring technology, applied in the field of cell microelectrode array chip and its preparation, can solve problems such as single use, and achieve the effects of excellent conductivity, novel structure and guaranteed reliability
Inactive Publication Date: 2016-03-02
SHANGHAI JIAOTONG UNIV
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Problems solved by technology
[0004] The present invention aims at the shortcomings of the electrodes used in cell detection in the above prior art, such as simple design structure and single use, and provides a co-wiring microelectrode array chip and its preparation method
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[0034] This embodiment relates to a co-wiring micro-electrode array chip, its structure is as follows Figure 4 As shown, the microelectrode array structure layer on the chip includes a plurality of microelectrodes 1 arranged in a grating array structure and a plurality of microelectrodes 5 arranged in a dot-like array structure superimposed on the grating array.
[0035] The co-wiring microelectrode array chip of this embodiment adopts a new structural design and process, specifically: designing a first mask with a grating array structure and a second mask with a lattice array structure in a certain arrangement ; Deposit a layer of metal on the glass substrate, use the first mask, and use photolithography technology to prepare the grating array electrode with the required photoresist structure; use the mask of photoresist and metal, and use ion beam etching technology , open a metal window to obtain a grating electrode array chip; then deposit SiO on the chip in turn 2 Thin ...
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Abstract
The invention discloses a common wiring microelectrode array chip and a manufacturing method thereof. A microelectrode array structure layer of the microelectrode array chip comprises a plurality of microelectrodes arranged in a grating array structure and a plurality of microelectrodes laid on a grating array and arranged in a punctiform array structure. The common wiring principle and the photoetching overlay technology are used for the chip, a first mask plate of a grating array structure and a second mask plate of a punctiform array structure are adopted, and the common wiring microelectrode array chip is manufactured by means of the metal deposition process, the ion-beam etching technology, the wet etching process and the like. Various microelectrode arrays are integrated on the chip, efficiency of the biological chip is used fully, cost is reduced, and the requirements for biological detection and recording of different cells for different purposes can be met; because the lead layout of the microelectrodes is completely consistent with that of a commercial microelectrode chip, and therefore the common wiring microelectrode array chip has good compatibility and universality during detection and can be produced in a standardized mode in batches.
Description
technical field [0001] The invention relates to a cell microelectrode array chip and a preparation method thereof; in particular to a co-wiring microelectrode array chip and a preparation method thereof. Background technique [0002] Microelectrodes were developed in the 1930s and 1940s. The discovery of microelectrodes quickly laid the foundation for the study of microphysiology of excitable tissues ((1)ThomasCA, SpringerPA, LoebGE, Berwald-NetterY, OkunLM.1972.Aminiaturemicroelectrodearraytomonitorthebioelectricactivityofculturedcells.ExpCellRes.74:61-66;(2) Boven K-H, Fejtl M, A, Nisch W, Stett A. On Micro-Electrode Array Revival. In: Baudry M, Taketani M, eds. Advances in Network Electrophysiology Using Multi-Electrode Arrays. New York: Springer Press; 2006: 24-37). Microphysiology makes it possible not only to study the activities of the smallest cells deep in the organs of higher animals, but also to study the activities of various parts of these cells. The disadva...
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IPC IPC(8): G01N27/403
Inventor 李海华王庆康
Owner SHANGHAI JIAOTONG UNIV