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Preparation method of submicron spherical electrode

An electrode preparation device and sub-micron technology, which are applied in electrode manufacturing, machining electrodes, electric machining equipment, etc., can solve the problems of poor surface quality of tool electrodes and unattainable diameter of ball head, etc., and achieve high precision and strong practicability. , the effect of simple operation

Active Publication Date: 2016-01-13
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Problems solved by technology

[0005] Aiming at the problems of poor surface quality of tool electrodes and the fact that the diameter of the ball head cannot reach the submicron level, a device and method for preparing a submicron ball head electrode are provided.

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  • Preparation method of submicron spherical electrode
  • Preparation method of submicron spherical electrode
  • Preparation method of submicron spherical electrode

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Embodiment Construction

[0014] according to figure 1 As shown, the submicron spherical electrode probe preparation device of the present invention mainly includes a PCI motion control card 5 and an industrial computer 14; it also includes a Y-axis precision mobile platform 2 and an X-axis precision movement platform located on the active vibration isolation platform 1. Platform (3), the Z-axis precision mobile platform 10 located on the machine tool column; the micron-sized tungsten wire 7 is clamped on the chuck 8 installed on the Z-axis precision mobile platform 10; the ring installed horizontally on the electrolytic cell 18 Cathode 5, the positive and negative poles of high-frequency pulse power supply 11 are respectively connected to micron tungsten wire 7 and ring cathode 5; the circuit current is collected by oscilloscope 12, and the current signal is sent to industrial computer 14 by data acquisition card 13; in addition Including video capture card 16 and CCD17.

[0015] figure 2 It is the...

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Abstract

A submicron ball-point electrode preparation device and a method belong to the field of precision and microfine manufacturing and measurement. By a liquid film pulse electrochemical machining method, a submicron probe with good surface quality can be prepared. On this basis, a submicron ball-point tool electrode is prepared through instant micro-discharge fusion and condensation processes.

Description

technical field [0001] The invention relates to a submicron spherical head electrode preparation device and method, belonging to the field of precision micromanufacturing and measurement. technical background [0002] The development of MEMS technology has further promoted the development of products towards miniaturization, integration, and intelligence, and the demand for micromachining tool electrodes and ultra-micro measuring tools is increasing. Microball head electrode refers to a special-shaped electrode tool with a microscale sphere at the tip of the probe, which is widely used in technical fields such as Wiener manufacturing, micro-measurement, non-destructive testing of cells, aerospace and microelectronics. Compared with other types of probes, the microsphere head electrode has unparalleled advantages in some fields and is an ideal tool electrode type. For example, in the field of micro-measurement, micro-ball head probe tools can measure large aspect ratio and t...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23H3/04
Inventor 曾永彬王玉峰曲宁松朱荻
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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