Fin type field effect transistor and forming method thereof
A technology of fin field effect transistor and fin field effect, which is applied in the direction of semiconductor devices, semiconductor/solid state device manufacturing, electrical components, etc., can solve the problems of inapplicability, achieve the purpose of increasing the driving current, increasing the carrier migration rate, The effect of simple process
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0029] It can be known from the background art that in order to improve the performance of the fin field effect transistor device, stress can be introduced into the channel region of the MOS transistor to increase the mobility of carriers. However, with the development of semiconductor technology, such as the nitride capping layer (Nitride-Cap) stress layer, due to the high dielectric constant will increase the parasitic capacitance in the device, and the high parasitic capacitance will cause signal delay in the device and affect the chip performance. , so the use of the nitride cap layer stress layer is no longer suitable for highly integrated fin field effect transistor processes. The device performance of the fin field effect transistor in the prior art needs to be further improved.
[0030] In order to solve the above problems, the inventors of the present invention propose a method for forming a FinFET. The advantages of the present invention will become clearer by descr...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com