Metal frame subtractive embedded chip structure and process method
A metal plating and chip technology, applied in the direction of electrical components, electrical solid devices, circuits, etc., can solve the problems of lack of system functions in metal lead frames, and achieve the effects of improving heat dissipation, small size, and reducing costs
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[0061] The process method of the present invention is to etch first and then plate the metal frame subtractively to embed the chip with the flat leg structure as follows:
[0062] Step 1. Take the metal substrate
[0063] see figure 1 , take a piece of metal substrate with appropriate thickness, the material of this plate is mainly metal material, and the material of metal material can be copper, iron, galvanized, stainless steel, aluminum or metal that can achieve conductive function Material or non-all-metal material, etc., and the choice of thickness can be selected according to product characteristics.
[0064] Step 2. Paste photoresist film
[0065] see figure 2 , A photoresist film that can be exposed and developed is pasted on the front and back of the metal substrate to protect the subsequent etching process. The photoresist film can be a dry photoresist film or a wet photoresist film.
[0066] Step 3. Remove part of the photoresist film from the surface of the m...
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