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A chemical vapor deposition method of exhaust gas recycling method for metal organic

A chemical vapor deposition, organometallic technology, applied in chemical instruments and methods, separation methods, preparation/separation of ammonia, etc.

Inactive Publication Date: 2014-04-02
古明见
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although it can effectively treat toxic waste gas, it cannot recover and reuse the available gas in the waste gas

Method used

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  • A chemical vapor deposition method of exhaust gas recycling method for metal organic
  • A chemical vapor deposition method of exhaust gas recycling method for metal organic

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Embodiment Construction

[0016] Please also see figure 1 as well as figure 2 , figure 1 It is a flow chart of the exhaust gas recovery and regeneration method of the organometallic chemical vapor deposition method of the present invention, figure 2 It is the ammonia water concentration table of the exhaust gas recovery and regeneration method of the organometallic chemical vapor deposition method of the present invention. The waste gas recycling and regeneration method of the metalorganic chemical vapor deposition method of the present invention comprises: (A) introducing the waste gas produced by the metalorganic chemical vapor deposition method (MOCVD) into water; The water of the exhaust gas is cooled to remove impurities from the ammonia gas stored in the water; and (C) the aforementioned water containing ammonia gas is heated to escape the ammonia gas; by the above method, the organometallic chemical vapor deposition process can be The exhaust gas removes impurities such as nitrogen, hydroge...

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Abstract

The present invention relates to a chemical vapor deposition method of exhaust gas recycling method for metal organic, the steps comprises: of the exhaust gas generated by the metal organic chemical vapor deposition (MOCVD) method is introduced into the water; containing a metal organic chemical vaporwater cooling phase deposition method of the exhaust gas to be stored in the water of ammonia, to remove impurities; and at said ammonia-containing water of increasing the temperature ammonia escape; by the above method, the organometallicthe recycling production chemical vapor deposition process of exhaust gas to remove impurities such as nitrogen, hydrogen, and methane into usable ammonia, to achieve the purpose of re-use of exhaust gas recirculation.

Description

technical field [0001] The present invention relates to a waste gas recovery and reuse method, in particular to a process of utilizing the high solubility of ammonia gas, which can be dissolved in water to separate it from other waste gases, and then through gasification, heating and compression to lower the temperature. The purpose of recovering and reusing waste gas of organometallic chemical vapor deposition is achieved. Background technique [0002] Organometallic chemical vapor deposition is the most advanced and important mass production technology for gallium nitride materials and devices. With its appearance, the production cost of blue light-emitting materials has gradually decreased; it is mainly used in LED and DVD lasers. Diodes, optical communication laser diodes, red, blue and green light-emitting diodes, solar cells, or radio frequency integrated circuits of mobile phone communication radio frequency chips, etc. However, the waste gas produced by it is curren...

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Application Information

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IPC IPC(8): B01D53/14C01C1/12
Inventor 古明见
Owner 古明见