Multilayer antioxidant high-temperature-resistant SiC/Ta/C/Ta/SiC coating and preparation method thereof
A technology with high temperature resistance and anti-oxidation, applied in the direction of layered products, etc., can solve the problems of weak bonding strength of the coating, easy peeling off, mismatch of thermal expansion coefficient between the coating and the substrate, etc., to alleviate the difference in thermal expansion coefficient and improve oxidation resistance performance, the effect of improving thermal shock performance
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[0014] Example
[0015] A SiC / Ta / C / Ta / SiC multilayer anti-oxidation and high temperature resistant coating, which is composed of SiC layer, Ta layer and C layer, and is characterized in that the order of stacking is SiC layer, Ta layer, C layer, Ta Layers and SiC layers are cycled twice. Both sides of the C layer are Ta layers, and the innermost and outermost layers are both SiC layers. The thickness of the SiC layer is 20 μm, the thickness of the Ta layer is 10 μm, and the thickness of the C layer is 20 μm.
[0016] The method for preparing the above-mentioned anti-oxidation coating is characterized in that it comprises the following steps:
[0017] (1) Use chemical vapor deposition to deposit a layer of SiC on the surface of the substrate. The deposition conditions of the SiC layer are as follows: Trichloromethylsilane is the precursor, argon is the diluent gas, hydrogen is the carrier gas, and the deposition temperature is 1000°C. Deposition time 10h;
[0018] (2) The Ta layer is...
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