Multilayer antioxidant high-temperature-resistant SiC/Ta/C/Ta/SiC coating and preparation method thereof
A technology with high temperature resistance and anti-oxidation, applied in the direction of layered products, etc., can solve the problems of weak bonding strength of the coating, easy peeling off, mismatch of thermal expansion coefficient between the coating and the substrate, etc., to alleviate the difference in thermal expansion coefficient and improve oxidation resistance performance, the effect of improving thermal shock performance
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[0015] A SiC / Ta / C / Ta / SiC multilayer anti-oxidation and high-temperature resistant coating, which is composed of SiC layer, Ta layer and C layer, is characterized in that the order of lamination is SiC layer, Ta layer, C layer, Ta layer Layer, SiC layer, cycle 2 times, both sides of the C layer are Ta layers, and the innermost and outermost layers are SiC layers. The thickness of the SiC layer is 20 μm, the thickness of the Ta layer is 10 μm, and the thickness of the C layer is 20 μm.
[0016] The preparation method of above-mentioned anti-oxidation coating is characterized in that comprising the steps of following sequence:
[0017] (1) A layer of SiC is deposited on the surface of the substrate by chemical vapor deposition. The deposition conditions of the SiC layer are as follows: trichloromethylsilane is the precursor, argon is the dilution gas, hydrogen is the carrier gas, and the deposition temperature is 1000°C. Deposition time 10h;
[0018] (2) Deposit Ta layer by che...
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