The invention relates to the technical field of
alloy surface coating, in particular to a high-adhesion
diamond-like
film coating method. The high-adhesion
diamond-like
film coating method comprises the following steps that an
alloy base material is subjected to ultrasonic cleaning and
drying, heat preservation is conducted for 1-2 h at the temperature of 160-200 DEG C in a
vacuum state,
plasma cleaning is conducted for 10-30 min under
argon protection, and pretreated
alloy is obtained; taking
titanium as a target material, carrying out magnetron
sputtering on the surface of the pretreated alloy to form a bottom layer, then respectively taking
titanium carbide and
chromium as target materials, and simultaneously carrying out magnetron
sputtering on the surface of the bottom layer to form a deposition layer; keeping the vacuum degree in the vacuum cavity to be 0.2-0.6 Pa, introducing
acetylene gas into the vacuum cavity, and forming a pre-deposited
diamond-like
carbon layer on the surface of the deposited layer by adopting an
anode ion beam technology; and then the diamond-like
carbon layer is placed in a filtered
cathode vacuum arc device,
graphite serves as a
cathode target material, and the diamond-like
carbon layer is formed under the conditions that the air pressure is 0.2-0.6 Pa, the current is 50-70 A and the vacuum
negative bias voltage is 60-100 V.