Optical Tamm state plasmon-based light refractive index sensor
A technology of plasmon and light refraction, applied in the field of optoelectronics, can solve the problem of small sensing range, achieve the effect of improving sensitivity, reducing manufacturing difficulty, wide range and high precision measurement
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[0038] In this embodiment, the material of the metal thin film 1 is selected to be silver, the material of the high refractive index layer 2 is silicon, and the material of the connecting block 4 is silicon dioxide. The thickness of the metallic silver film is 50nm, next to the metallic silver film is a distributed Bragg reflector, which is composed of silicon layers and air layers alternately arranged with each other, the number of periods is 4, the thickness of the silicon layer is l / 4n, and the air layer consists of The silicon dioxide layer is etched and has a thickness of 1 / 4, where l represents the central wavelength of the distributed Bragg reflector (DBR), and n represents the refractive index of the silicon medium. In this embodiment, a metal-DBR structure is selected when the central wavelength of the distributed Bragg reflector (DBR) is 400 nm and the refractive index of silicon is 3.42.
[0039] figure 2 , image 3 Respectively, the above metal-DBR structure in ...
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