High-frequency vibration aging system and method for eliminating residual stress of small-size component

Abstract

The invention discloses a high-frequency vibration aging system which comprises a signal generator, a power amplifier, a vibration platform, a vibration level amplification device, a charge amplifier, an oscilloscope and a processor, wherein the processor is used for controlling the signal generator to output a sine excitation signal; the vibration level amplification device is fixed on the surface of an excitation table; acceleration sensors are respectively connected with the input channels of the charge amplifier; the output channels of the charge amplifier are respectively connected with the oscilloscope; the oscilloscope is connected with the processor. A method for eliminating residual stress of a small-size component comprises the following steps: manufacturing the vibration level amplification device, manufacturing a press block, clamping of the small-size component on an upper support platform, arranging a second accelerator on the upper support platform, arranging the first acceleration sensor on a lower chassis, fixing the lower chassis on the surface of the excitation table, determining the excitation frequency of high-frequency vibration aging output from the signal generator, and performing high-frequency vibration aging processing on the small-size component till the amplitude value of voltage waveform displayed on the oscilloscope is stable. The system has the advantage that the residual stress of the small-size component can be eliminated through vibration.

Description

technical field [0001] The invention relates to a high-frequency vibration aging system and method for eliminating residual stress of small-sized components, and is especially suitable for small-sized components such as MEMS. technical background [0002] Vibration aging technology is a commonly used residual stress elimination method in the field of mechanical engineering. By applying a mechanical vibration load to the component, when the sum of the residual stress inside the component and the additional vibration stress exceeds the local yield limit of the material, the material will undergo local deformation. Plastic deformation, so that the residual stress inside the material can be relaxed and reduced. [0003] The traditional low-frequency vibration aging uses an adjustable motor as the vibration device, which acts on the component with a large-amplitude dynamic stress to eliminate the residual stress. The macroscopic deformation of the component is large, which easily...

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Problems solved by technology

[0004] In order to overcome the disadvantage that the existing technology cannot realize the elimination of residual stress by vibration for small-sized components, the present invention provides a high-frequency vibration aging system and method for eliminating residual stress of small-sized components that can eliminate residual stress by vibration , the system and method apply small-amplitude dynamic stress to the component to eliminate the residual stress, which belongs to the micro-amplitude excitation aging effect, and the macroscopic deformation of the component is small, which can protect the component from the risk of fatigue damage, and is especially suitable for eliminating small-sized components such as MEMS residual stress

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