Micro-ring resonant cavity tunable optical filter based on liquid crystal slit waveguides

Abstract

The invention discloses a micro-ring resonant cavity tunable optical filter based on liquid crystal slit waveguides. The micro-ring resonant cavity tunable optical filter comprises a substrate, a first straight waveguide, a second straight waveguide, a micro-ring waveguide, a first electrode, a second electrode and an upper wrapping layer. The first straight waveguide and/or the second straight waveguide are/is internally provided with slit structures or a slit structure, the first straight waveguide and the second straight waveguide are respectively arranged on the upper surface of the substrate, a slit structure is arranged in the micro-ring waveguide, the micro-ring waveguide is arranged on the substrate and located between the first straight waveguide and the second straight waveguide, the first electrode is arranged in an inner circular ring region of the micro-ring waveguide, and the second electrode is arranged in an outer circular ring region of the micro-ring waveguide. The first straight waveguide, the second straight waveguide, the micro-ring waveguide, the first electrode and the second electrode are respectively covered with the upper wrapping layer, and the slit structures are filled with the upper wrapping layer. The micro-ring resonant cavity tunable optical filter has the advantages of being low in control voltage, large in resonant wavelength tuning range and simple in structure.

Description

technical field [0001] The invention belongs to the technical field of optical communication, and in particular relates to a micro-ring resonant cavity type tunable optical filter based on a liquid crystal slit waveguide. Background technique [0002] The concept of optical microring resonator was first proposed by Marcatili in 1969, that is, when the wavelength of light meets certain conditions, interference resonance can be performed in the optical ring, and then the function of frequency filtering can be realized. [0003] In recent years, with the rapid development of the planar waveguide manufacturing process, the silicon-based microring resonator device, as one of the most important basic devices in the integrated optical circuit, has become more and more prominent in its integration and performance diversity. However, the microring resonator The cavity-type tunable filter mainly adopts thermo-optic effect tuning, electro-optic effect tuning, and carrier injection. The...

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Problems solved by technology

[0003] In recent years, with the rapid development of the planar waveguide manufacturing process, the silicon-based microring resonator device, as one of the most important basic devices in the integrated optical circuit, has become more and more prominent in its integration and performance diversity. However, the microring resonator The cavity-type tunable filter mainly adopts thermo-optic effect tuning, electro-optic effect tuning, and carrier injection. The above-mentioned traditional tuning methods have problems such as large power consumption and control restrictions. In comparison, At present, the liquid crystal waveguide microring resonator type optical filter, which uses the strip waveguide as the basic waveguide structure to form a microring resonator structure, overcomes the technical problem of large power consumption in the traditional tuning method to a certain extent, but due to the structure Directly using strip waveguide to form a microring resonator structure also has the following disadvantages:

[0004] 1. The tuning voltage is too large, which limits the application range of optical filters;

[0005] 2. The tuning range of the resonant wavelength is small;

[0006] 3. The electrode structure design is more complicated

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