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A reconfigurable mid-infrared metasurface filter device based on indium tin oxide

The application discloses a reconfigurable indium tin oxide-based mid-infrared metasurface filter device, which comprises a substrate, a dielectric layer and a metasurface structure unit arranged on the substrate in sequence; the metasurface structure unit is concentrically arranged with the dielectric layer and jointly forms a basic unit, and the basic unit is periodically arranged on the upper surface of the substrate; the material of the metasurface structure unit is indium tin oxide, so that the device can work stably for a long time under complex working conditions. Meanwhile, the amorphous phase has a relatively low refractive index and extinction coefficient in the mid-infrared wave band, which is beneficial to reducing the internal optical loss of the device. By adjusting the key geometric parameters of the metasurface structure unit, including thickness h , radius R and arrangement period p , the filter range can be flexibly regulated. In addition, the reversible switching between the amorphous phase and the crystal phase of ITO can be driven by external excitation, so that the filter range of the device can be switched, and dynamic regulation between the two wave bands of 6-7 mu m and 8-10 mu m can be realized.
Owner:XI AN JIAOTONG UNIV