Micro-mechanical clamped beam type pi type continuous reconfigurable microwave band-pass filter

Abstract

The invention discloses a micro-mechanical clamped beam type pi type continuous reconfigurable microwave band-pass filter. The micro-mechanical clamped beam type pi type continuous reconfigurable microwave band-pass filter uses a planar spiral inductor, two identical MEMS variable planar plate capacitors and two identical MIM capacitors are symmetrically arranged at the left and right sides of the planar spiral inductor in sequence, wherein each MEMS variable planar plate capacitor is connected between a CPW signal wire and a ground wire in parallel while each MIM capacitor is connected with the CPW signal wire in series so as to make up a pi type topological structure with band-pass characteristics. The MEMS variable planar plate capacitors achieve different capacitances based on an electrostatic principle; the upper pole plate of each MEMS variable planar plate capacitor is an MEMS clamped beam while the lower pole plate thereof is the CPW signal wire, wherein the MEMS clamped beam stretches across the CPW signal wire, two anchoring areas are located on the CPW ground wire, and a drive electrode is arranged at each of two sides of the CPW signal wire under the MEMS clamped beam. The micro-mechanical clamped beam type pi type continuous reconfigurable microwave band-pass filter realizes the continuous tuning for the center frequency and the band width and has advantages of low loss, good out-of-band rejection and wide frequency band tuning.

Description

technical field [0001] The invention provides a micro-mechanical fixed-beam type π-type continuous reconfigurable microwave band-pass filter, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] In modern microwave communication systems, reconfigurable filters have important application and research value in military and civil transceiver components. It can not only dynamically select useful signals and reduce interference between channels according to application requirements, but also greatly reduce the size of multi-band transceiver components. Reconfigurable filters can be divided into two types: digital and analog. Among them, the digital reconfigurable filter can only realize the tuning of some discrete operating frequencies, which is greatly limited in application; while the analog reconfigurable filter can be used to realize the tuning of continuous operating frequencies within a certain range. At present, i...

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Problems solved by technology

Among them, the digital reconfigurable filter can only realize the tuning of some discrete operating frequencies, which is greatly limited in application; while the analog reconfigurable filter can be used to realize the tuning of continuous operating frequencies within a certain range. Currently has great application prospects

[0003] In the design of passive filters, filters designed by traditional methods (such as synthesis method or insertion loss method) not only require a large number of inductances but also a large inductance, which increases the size of the filter and parasitic loss, which is Goes against the development of today's miniaturized, low-loss microwave transceiver components

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